5/31/2011	9:12:04 AM	Recipe started at 9:12 AM
5/31/2011	9:12:04 AM	Helium valve closed
5/31/2011	9:12:04 AM	H2 valve closed
5/31/2011	9:12:04 AM	BCl3 valve closed
5/31/2011	9:12:04 AM	PH3 valve closed
5/31/2011	9:12:04 AM	SiCl4 pre valve closed
5/31/2011	9:12:04 AM	SiCl4 post valve closed
5/31/2011	9:12:04 AM	Main Vac valve closed
5/31/2011	9:12:04 AM	Bubbler valve closed
5/31/2011	9:12:04 AM	Bypass valve opened
5/31/2011	9:12:04 AM	Helium MFC set to  0.000000
5/31/2011	9:12:04 AM	H2 MFC set to  0.000000
5/31/2011	9:12:04 AM	BCl3 MFC set to  0.000000
5/31/2011	9:12:04 AM	PHl3 MFC set to  0.000000
5/31/2011	9:12:04 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:12:04 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:12:04 AM	Tube furnace set to 100
5/31/2011	9:12:05 AM	Helium valve closed
5/31/2011	9:12:05 AM	H2 valve closed
5/31/2011	9:12:05 AM	BCl3 valve closed
5/31/2011	9:12:05 AM	PH3 valve closed
5/31/2011	9:12:05 AM	SiCl4 pre valve closed
5/31/2011	9:12:05 AM	SiCl4 post valve closed
5/31/2011	9:12:05 AM	Bubbler valve closed
5/31/2011	9:12:05 AM	Main Vac valve opened
5/31/2011	9:12:05 AM	Bypass valve opened
5/31/2011	9:12:05 AM	Helium MFC set to  0.000000
5/31/2011	9:12:05 AM	H2 MFC set to  0.000000
5/31/2011	9:12:05 AM	BCl3 MFC set to  0.000000
5/31/2011	9:12:05 AM	PHl3 MFC set to  0.000000
5/31/2011	9:12:05 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:12:05 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:12:05 AM	Tube furnace set to 100
5/31/2011	9:12:09 AM	H2 valve closed
5/31/2011	9:12:09 AM	BCl3 valve closed
5/31/2011	9:12:09 AM	PH3 valve closed
5/31/2011	9:12:09 AM	SiCl4 pre valve closed
5/31/2011	9:12:09 AM	SiCl4 post valve closed
5/31/2011	9:12:09 AM	Main Vac valve closed
5/31/2011	9:12:09 AM	Bypass valve closed
5/31/2011	9:12:09 AM	Bubbler valve closed
5/31/2011	9:12:09 AM	Helium valve opened
5/31/2011	9:12:09 AM	Helium MFC set to  400.000000
5/31/2011	9:12:09 AM	H2 MFC set to  0.000000
5/31/2011	9:12:09 AM	BCl3 MFC set to  0.000000
5/31/2011	9:12:09 AM	PHl3 MFC set to  0.000000
5/31/2011	9:12:09 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:12:09 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:12:09 AM	Tube furnace set to 100
5/31/2011	9:13:52 AM	H2 valve closed
5/31/2011	9:13:52 AM	BCl3 valve closed
5/31/2011	9:13:52 AM	PH3 valve closed
5/31/2011	9:13:52 AM	SiCl4 pre valve closed
5/31/2011	9:13:52 AM	SiCl4 post valve closed
5/31/2011	9:13:52 AM	Main Vac valve closed
5/31/2011	9:13:52 AM	Bypass valve closed
5/31/2011	9:13:52 AM	Helium valve opened
5/31/2011	9:13:52 AM	Bubbler valve opened
5/31/2011	9:13:52 AM	Helium MFC set to  400.000000
5/31/2011	9:13:52 AM	H2 MFC set to  0.000000
5/31/2011	9:13:52 AM	BCl3 MFC set to  0.000000
5/31/2011	9:13:52 AM	PHl3 MFC set to  0.000000
5/31/2011	9:13:52 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:13:52 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:13:52 AM	Tube furnace set to 100
5/31/2011	9:14:36 AM	Helium valve closed
5/31/2011	9:14:36 AM	H2 valve closed
5/31/2011	9:14:36 AM	BCl3 valve closed
5/31/2011	9:14:36 AM	PH3 valve closed
5/31/2011	9:14:36 AM	SiCl4 pre valve closed
5/31/2011	9:14:36 AM	SiCl4 post valve closed
5/31/2011	9:14:36 AM	Main Vac valve closed
5/31/2011	9:14:36 AM	Bypass valve closed
5/31/2011	9:14:36 AM	Bubbler valve closed
5/31/2011	9:14:36 AM	Helium MFC set to  0.000000
5/31/2011	9:14:36 AM	H2 MFC set to  0.000000
5/31/2011	9:14:36 AM	BCl3 MFC set to  0.000000
5/31/2011	9:14:36 AM	PHl3 MFC set to  0.000000
5/31/2011	9:14:36 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:14:36 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:14:36 AM	Tube furnace set to 100
5/31/2011	9:15:06 AM	Helium valve closed
5/31/2011	9:15:06 AM	H2 valve closed
5/31/2011	9:15:06 AM	BCl3 valve closed
5/31/2011	9:15:06 AM	PH3 valve closed
5/31/2011	9:15:06 AM	SiCl4 pre valve closed
5/31/2011	9:15:06 AM	SiCl4 post valve closed
5/31/2011	9:15:06 AM	Main Vac valve closed
5/31/2011	9:15:06 AM	Bubbler valve closed
5/31/2011	9:15:06 AM	Bypass valve opened
5/31/2011	9:15:06 AM	Helium MFC set to  0.000000
5/31/2011	9:15:06 AM	H2 MFC set to  0.000000
5/31/2011	9:15:06 AM	BCl3 MFC set to  0.000000
5/31/2011	9:15:06 AM	PHl3 MFC set to  0.000000
5/31/2011	9:15:06 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:15:06 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:15:07 AM	Tube furnace set to 100
5/31/2011	9:15:27 AM	Helium valve closed
5/31/2011	9:15:27 AM	H2 valve closed
5/31/2011	9:15:27 AM	BCl3 valve closed
5/31/2011	9:15:27 AM	PH3 valve closed
5/31/2011	9:15:27 AM	SiCl4 pre valve closed
5/31/2011	9:15:27 AM	SiCl4 post valve closed
5/31/2011	9:15:27 AM	Bubbler valve closed
5/31/2011	9:15:27 AM	Main Vac valve opened
5/31/2011	9:15:27 AM	Bypass valve opened
5/31/2011	9:15:27 AM	Helium MFC set to  0.000000
5/31/2011	9:15:27 AM	H2 MFC set to  0.000000
5/31/2011	9:15:27 AM	BCl3 MFC set to  0.000000
5/31/2011	9:15:27 AM	PHl3 MFC set to  0.000000
5/31/2011	9:15:27 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:15:27 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:15:27 AM	Tube furnace set to 100
5/31/2011	9:15:28 AM	Run finished at 9:15 AM
5/31/2011	9:16:57 AM	Recipe started at 9:16 AM
5/31/2011	9:16:57 AM	Helium valve closed
5/31/2011	9:16:57 AM	BCl3 valve closed
5/31/2011	9:16:58 AM	PH3 valve closed
5/31/2011	9:16:58 AM	SiCl4 pre valve closed
5/31/2011	9:16:58 AM	SiCl4 post valve closed
5/31/2011	9:16:58 AM	Main Vac valve closed
5/31/2011	9:16:58 AM	Bypass valve closed
5/31/2011	9:16:58 AM	Bubbler valve closed
5/31/2011	9:16:58 AM	H2 valve opened
5/31/2011	9:16:58 AM	Helium MFC set to  0.000000
5/31/2011	9:16:58 AM	H2 MFC set to  500.000000
5/31/2011	9:16:58 AM	BCl3 MFC set to  0.000000
5/31/2011	9:16:58 AM	PHl3 MFC set to  0.000000
5/31/2011	9:16:58 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:16:58 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:16:58 AM	Tube furnace set to 200
5/31/2011	9:18:17 AM	Helium valve closed
5/31/2011	9:18:17 AM	BCl3 valve closed
5/31/2011	9:18:17 AM	PH3 valve closed
5/31/2011	9:18:17 AM	SiCl4 pre valve closed
5/31/2011	9:18:17 AM	SiCl4 post valve closed
5/31/2011	9:18:17 AM	Main Vac valve closed
5/31/2011	9:18:17 AM	Bypass valve closed
5/31/2011	9:18:17 AM	H2 valve opened
5/31/2011	9:18:17 AM	Bubbler valve opened
5/31/2011	9:18:17 AM	Helium MFC set to  0.000000
5/31/2011	9:18:17 AM	H2 MFC set to  400.000000
5/31/2011	9:18:17 AM	BCl3 MFC set to  0.000000
5/31/2011	9:18:17 AM	PHl3 MFC set to  0.000000
5/31/2011	9:18:17 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:18:17 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:18:17 AM	Tube furnace set to 1002
5/31/2011	9:34:57 AM	Helium valve closed
5/31/2011	9:34:57 AM	PH3 valve closed
5/31/2011	9:34:57 AM	Main Vac valve closed
5/31/2011	9:34:57 AM	Bypass valve closed
5/31/2011	9:34:57 AM	H2 valve opened
5/31/2011	9:34:57 AM	BCl3 valve opened
5/31/2011	9:34:57 AM	SiCl4 pre valve opened
5/31/2011	9:34:57 AM	SiCl4 post valve opened
5/31/2011	9:34:57 AM	Bubbler valve opened
5/31/2011	9:34:57 AM	Helium MFC set to  0.000000
5/31/2011	9:34:57 AM	H2 MFC set to  500.000000
5/31/2011	9:34:57 AM	BCl3 MFC set to  2.500000
5/31/2011	9:34:57 AM	PHl3 MFC set to  0.000000
5/31/2011	9:34:57 AM	SiCl4 MFC set to  50.000000
5/31/2011	9:34:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:34:57 AM	Tube furnace set to 1000
5/31/2011	9:37:57 AM	H2 valve closed
5/31/2011	9:37:57 AM	BCl3 valve closed
5/31/2011	9:37:57 AM	PH3 valve closed
5/31/2011	9:37:57 AM	SiCl4 pre valve closed
5/31/2011	9:37:57 AM	SiCl4 post valve closed
5/31/2011	9:37:57 AM	Main Vac valve closed
5/31/2011	9:37:57 AM	Bypass valve closed
5/31/2011	9:37:57 AM	Helium valve opened
5/31/2011	9:37:57 AM	Bubbler valve opened
5/31/2011	9:37:57 AM	Helium MFC set to  400.000000
5/31/2011	9:37:57 AM	H2 MFC set to  0.000000
5/31/2011	9:37:57 AM	BCl3 MFC set to  0.000000
5/31/2011	9:37:57 AM	PHl3 MFC set to  0.000000
5/31/2011	9:37:57 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:37:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:37:57 AM	Tube furnace set to 0
5/31/2011	9:57:57 AM	Helium valve closed
5/31/2011	9:57:57 AM	H2 valve closed
5/31/2011	9:57:57 AM	BCl3 valve closed
5/31/2011	9:57:57 AM	PH3 valve closed
5/31/2011	9:57:57 AM	SiCl4 pre valve closed
5/31/2011	9:57:57 AM	SiCl4 post valve closed
5/31/2011	9:57:57 AM	Main Vac valve closed
5/31/2011	9:57:57 AM	Bypass valve closed
5/31/2011	9:57:57 AM	Bubbler valve closed
5/31/2011	9:57:57 AM	Helium MFC set to  0.000000
5/31/2011	9:57:57 AM	H2 MFC set to  0.000000
5/31/2011	9:57:57 AM	BCl3 MFC set to  0.000000
5/31/2011	9:57:57 AM	PHl3 MFC set to  0.000000
5/31/2011	9:57:57 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:57:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:57:58 AM	Tube furnace set to 0
5/31/2011	9:57:58 AM	Run finished at 9:57 AM
5/31/2011	9:58:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	9:58:30 AM	Recipe started at 9:58 AM
5/31/2011	9:58:30 AM	Helium valve closed
5/31/2011	9:58:30 AM	H2 valve closed
5/31/2011	9:58:30 AM	BCl3 valve closed
5/31/2011	9:58:30 AM	PH3 valve closed
5/31/2011	9:58:30 AM	SiCl4 pre valve closed
5/31/2011	9:58:30 AM	SiCl4 post valve closed
5/31/2011	9:58:30 AM	Main Vac valve closed
5/31/2011	9:58:30 AM	Bubbler valve closed
5/31/2011	9:58:30 AM	Bypass valve opened
5/31/2011	9:58:30 AM	Helium MFC set to  0.000000
5/31/2011	9:58:30 AM	H2 MFC set to  0.000000
5/31/2011	9:58:30 AM	BCl3 MFC set to  0.000000
5/31/2011	9:58:30 AM	PHl3 MFC set to  0.000000
5/31/2011	9:58:30 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:58:30 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:58:30 AM	Tube furnace set to 0
5/31/2011	9:58:41 AM	Helium valve closed
5/31/2011	9:58:41 AM	H2 valve closed
5/31/2011	9:58:41 AM	BCl3 valve closed
5/31/2011	9:58:41 AM	PH3 valve closed
5/31/2011	9:58:41 AM	SiCl4 pre valve closed
5/31/2011	9:58:41 AM	SiCl4 post valve closed
5/31/2011	9:58:41 AM	Bubbler valve closed
5/31/2011	9:58:41 AM	Main Vac valve opened
5/31/2011	9:58:41 AM	Bypass valve opened
5/31/2011	9:58:41 AM	Helium MFC set to  0.000000
5/31/2011	9:58:41 AM	H2 MFC set to  0.000000
5/31/2011	9:58:41 AM	BCl3 MFC set to  0.000000
5/31/2011	9:58:41 AM	PHl3 MFC set to  0.000000
5/31/2011	9:58:41 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:58:41 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:58:41 AM	Tube furnace set to 0
5/31/2011	9:58:42 AM	Run finished at 9:58 AM
5/31/2011	9:58:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	9:58:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	9:58:46 AM	Recipe started at 9:58 AM
5/31/2011	9:58:46 AM	H2 valve closed
5/31/2011	9:58:46 AM	BCl3 valve closed
5/31/2011	9:58:46 AM	PH3 valve closed
5/31/2011	9:58:46 AM	SiCl4 pre valve closed
5/31/2011	9:58:46 AM	SiCl4 post valve closed
5/31/2011	9:58:46 AM	Main Vac valve closed
5/31/2011	9:58:46 AM	Bypass valve closed
5/31/2011	9:58:46 AM	Bubbler valve closed
5/31/2011	9:58:46 AM	Helium valve opened
5/31/2011	9:58:46 AM	Helium MFC set to  500.000000
5/31/2011	9:58:46 AM	H2 MFC set to  0.000000
5/31/2011	9:58:46 AM	BCl3 MFC set to  0.000000
5/31/2011	9:58:46 AM	PHl3 MFC set to  0.000000
5/31/2011	9:58:46 AM	SiCl4 MFC set to  0.000000
5/31/2011	9:58:46 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:58:46 AM	Tube furnace set to 0
5/31/2011	10:00:00 AM	Helium valve closed
5/31/2011	10:00:00 AM	H2 valve closed
5/31/2011	10:00:00 AM	BCl3 valve closed
5/31/2011	10:00:00 AM	PH3 valve closed
5/31/2011	10:00:00 AM	SiCl4 pre valve closed
5/31/2011	10:00:00 AM	SiCl4 post valve closed
5/31/2011	10:00:00 AM	Main Vac valve closed
5/31/2011	10:00:00 AM	Bypass valve closed
5/31/2011	10:00:00 AM	Bubbler valve closed
5/31/2011	10:00:00 AM	Helium MFC set to  0.000000
5/31/2011	10:00:00 AM	H2 MFC set to  0.000000
5/31/2011	10:00:00 AM	BCl3 MFC set to  0.000000
5/31/2011	10:00:00 AM	PHl3 MFC set to  0.000000
5/31/2011	10:00:00 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:00:00 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:00:00 AM	Tube furnace set to 0
5/31/2011	10:00:01 AM	Run finished at 10:00 AM
5/31/2011	10:00:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	10:04:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	10:04:45 AM	Recipe started at 10:04 AM
5/31/2011	10:04:45 AM	Helium valve closed
5/31/2011	10:04:45 AM	H2 valve closed
5/31/2011	10:04:45 AM	BCl3 valve closed
5/31/2011	10:04:45 AM	PH3 valve closed
5/31/2011	10:04:45 AM	SiCl4 pre valve closed
5/31/2011	10:04:45 AM	SiCl4 post valve closed
5/31/2011	10:04:45 AM	Main Vac valve closed
5/31/2011	10:04:45 AM	Bubbler valve closed
5/31/2011	10:04:45 AM	Bypass valve opened
5/31/2011	10:04:45 AM	Helium MFC set to  0.000000
5/31/2011	10:04:45 AM	H2 MFC set to  0.000000
5/31/2011	10:04:45 AM	BCl3 MFC set to  0.000000
5/31/2011	10:04:45 AM	PHl3 MFC set to  0.000000
5/31/2011	10:04:45 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:04:45 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:04:45 AM	Tube furnace set to 0
5/31/2011	10:05:16 AM	Helium valve closed
5/31/2011	10:05:16 AM	H2 valve closed
5/31/2011	10:05:16 AM	BCl3 valve closed
5/31/2011	10:05:16 AM	PH3 valve closed
5/31/2011	10:05:16 AM	SiCl4 pre valve closed
5/31/2011	10:05:16 AM	SiCl4 post valve closed
5/31/2011	10:05:16 AM	Bubbler valve closed
5/31/2011	10:05:16 AM	Main Vac valve opened
5/31/2011	10:05:16 AM	Bypass valve opened
5/31/2011	10:05:16 AM	Helium MFC set to  0.000000
5/31/2011	10:05:16 AM	H2 MFC set to  0.000000
5/31/2011	10:05:16 AM	BCl3 MFC set to  0.000000
5/31/2011	10:05:16 AM	PHl3 MFC set to  0.000000
5/31/2011	10:05:16 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:05:16 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:05:16 AM	Tube furnace set to 0
5/31/2011	10:05:17 AM	Run finished at 10:05 AM
5/31/2011	10:05:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	10:05:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	10:05:59 AM	Recipe started at 10:05 AM
5/31/2011	10:06:00 AM	Helium valve closed
5/31/2011	10:06:00 AM	H2 valve closed
5/31/2011	10:06:00 AM	BCl3 valve closed
5/31/2011	10:06:00 AM	PH3 valve closed
5/31/2011	10:06:00 AM	SiCl4 pre valve closed
5/31/2011	10:06:00 AM	SiCl4 post valve closed
5/31/2011	10:06:00 AM	Main Vac valve closed
5/31/2011	10:06:00 AM	Bubbler valve closed
5/31/2011	10:06:00 AM	Bypass valve opened
5/31/2011	10:06:00 AM	Helium MFC set to  0.000000
5/31/2011	10:06:00 AM	H2 MFC set to  0.000000
5/31/2011	10:06:00 AM	BCl3 MFC set to  0.000000
5/31/2011	10:06:00 AM	PHl3 MFC set to  0.000000
5/31/2011	10:06:00 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:06:00 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:06:00 AM	Tube furnace set to 0
5/31/2011	10:06:00 AM	Helium valve closed
5/31/2011	10:06:00 AM	H2 valve closed
5/31/2011	10:06:00 AM	BCl3 valve closed
5/31/2011	10:06:00 AM	PH3 valve closed
5/31/2011	10:06:00 AM	SiCl4 pre valve closed
5/31/2011	10:06:00 AM	SiCl4 post valve closed
5/31/2011	10:06:00 AM	Bubbler valve closed
5/31/2011	10:06:00 AM	Main Vac valve opened
5/31/2011	10:06:00 AM	Bypass valve opened
5/31/2011	10:06:00 AM	Helium MFC set to  0.000000
5/31/2011	10:06:00 AM	H2 MFC set to  0.000000
5/31/2011	10:06:00 AM	BCl3 MFC set to  0.000000
5/31/2011	10:06:00 AM	PHl3 MFC set to  0.000000
5/31/2011	10:06:00 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:06:00 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:06:00 AM	Tube furnace set to 0
5/31/2011	10:06:09 AM	H2 valve closed
5/31/2011	10:06:09 AM	BCl3 valve closed
5/31/2011	10:06:09 AM	PH3 valve closed
5/31/2011	10:06:09 AM	SiCl4 pre valve closed
5/31/2011	10:06:09 AM	SiCl4 post valve closed
5/31/2011	10:06:09 AM	Bubbler valve closed
5/31/2011	10:06:09 AM	Helium valve opened
5/31/2011	10:06:09 AM	Main Vac valve opened
5/31/2011	10:06:09 AM	Bypass valve opened
5/31/2011	10:06:09 AM	Helium MFC set to  100.000000
5/31/2011	10:06:09 AM	H2 MFC set to  0.000000
5/31/2011	10:06:09 AM	BCl3 MFC set to  0.000000
5/31/2011	10:06:09 AM	PHl3 MFC set to  0.000000
5/31/2011	10:06:09 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:06:09 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:06:09 AM	Tube furnace set to 0
5/31/2011	10:07:09 AM	Helium valve closed
5/31/2011	10:07:09 AM	H2 valve closed
5/31/2011	10:07:09 AM	BCl3 valve closed
5/31/2011	10:07:09 AM	PH3 valve closed
5/31/2011	10:07:09 AM	SiCl4 pre valve closed
5/31/2011	10:07:09 AM	SiCl4 post valve closed
5/31/2011	10:07:09 AM	Bubbler valve closed
5/31/2011	10:07:09 AM	Main Vac valve opened
5/31/2011	10:07:09 AM	Bypass valve opened
5/31/2011	10:07:09 AM	Helium MFC set to  0.000000
5/31/2011	10:07:09 AM	H2 MFC set to  0.000000
5/31/2011	10:07:09 AM	BCl3 MFC set to  0.000000
5/31/2011	10:07:09 AM	PHl3 MFC set to  0.000000
5/31/2011	10:07:09 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:07:09 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:07:09 AM	Tube furnace set to 0
5/31/2011	10:08:09 AM	H2 valve closed
5/31/2011	10:08:09 AM	BCl3 valve closed
5/31/2011	10:08:09 AM	PH3 valve closed
5/31/2011	10:08:09 AM	SiCl4 pre valve closed
5/31/2011	10:08:09 AM	SiCl4 post valve closed
5/31/2011	10:08:09 AM	Bubbler valve closed
5/31/2011	10:08:09 AM	Helium valve opened
5/31/2011	10:08:09 AM	Main Vac valve opened
5/31/2011	10:08:09 AM	Bypass valve opened
5/31/2011	10:08:09 AM	Helium MFC set to  100.000000
5/31/2011	10:08:09 AM	H2 MFC set to  0.000000
5/31/2011	10:08:09 AM	BCl3 MFC set to  0.000000
5/31/2011	10:08:09 AM	PHl3 MFC set to  0.000000
5/31/2011	10:08:09 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:08:09 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:08:10 AM	Tube furnace set to 0
5/31/2011	10:09:10 AM	Helium valve closed
5/31/2011	10:09:10 AM	H2 valve closed
5/31/2011	10:09:10 AM	BCl3 valve closed
5/31/2011	10:09:10 AM	PH3 valve closed
5/31/2011	10:09:10 AM	SiCl4 pre valve closed
5/31/2011	10:09:10 AM	SiCl4 post valve closed
5/31/2011	10:09:10 AM	Bubbler valve closed
5/31/2011	10:09:10 AM	Main Vac valve opened
5/31/2011	10:09:10 AM	Bypass valve opened
5/31/2011	10:09:10 AM	Helium MFC set to  0.000000
5/31/2011	10:09:10 AM	H2 MFC set to  0.000000
5/31/2011	10:09:10 AM	BCl3 MFC set to  0.000000
5/31/2011	10:09:10 AM	PHl3 MFC set to  0.000000
5/31/2011	10:09:10 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:09:10 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:09:10 AM	Tube furnace set to 0
5/31/2011	10:10:10 AM	H2 valve closed
5/31/2011	10:10:10 AM	BCl3 valve closed
5/31/2011	10:10:10 AM	PH3 valve closed
5/31/2011	10:10:10 AM	SiCl4 pre valve closed
5/31/2011	10:10:10 AM	SiCl4 post valve closed
5/31/2011	10:10:10 AM	Bubbler valve closed
5/31/2011	10:10:10 AM	Helium valve opened
5/31/2011	10:10:10 AM	Main Vac valve opened
5/31/2011	10:10:10 AM	Bypass valve opened
5/31/2011	10:10:10 AM	Helium MFC set to  100.000000
5/31/2011	10:10:10 AM	H2 MFC set to  0.000000
5/31/2011	10:10:10 AM	BCl3 MFC set to  0.000000
5/31/2011	10:10:10 AM	PHl3 MFC set to  0.000000
5/31/2011	10:10:10 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:10:10 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:10:10 AM	Tube furnace set to 0
5/31/2011	10:11:10 AM	Helium valve closed
5/31/2011	10:11:10 AM	H2 valve closed
5/31/2011	10:11:10 AM	BCl3 valve closed
5/31/2011	10:11:10 AM	PH3 valve closed
5/31/2011	10:11:10 AM	SiCl4 pre valve closed
5/31/2011	10:11:10 AM	SiCl4 post valve closed
5/31/2011	10:11:10 AM	Bubbler valve closed
5/31/2011	10:11:10 AM	Main Vac valve opened
5/31/2011	10:11:10 AM	Bypass valve opened
5/31/2011	10:11:10 AM	Helium MFC set to  0.000000
5/31/2011	10:11:10 AM	H2 MFC set to  0.000000
5/31/2011	10:11:10 AM	BCl3 MFC set to  0.000000
5/31/2011	10:11:10 AM	PHl3 MFC set to  0.000000
5/31/2011	10:11:10 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:11:10 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:11:10 AM	Tube furnace set to 0
5/31/2011	10:12:10 AM	H2 valve closed
5/31/2011	10:12:10 AM	BCl3 valve closed
5/31/2011	10:12:10 AM	PH3 valve closed
5/31/2011	10:12:10 AM	SiCl4 pre valve closed
5/31/2011	10:12:10 AM	SiCl4 post valve closed
5/31/2011	10:12:10 AM	Bubbler valve closed
5/31/2011	10:12:10 AM	Helium valve opened
5/31/2011	10:12:10 AM	Main Vac valve opened
5/31/2011	10:12:10 AM	Bypass valve opened
5/31/2011	10:12:10 AM	Helium MFC set to  100.000000
5/31/2011	10:12:10 AM	H2 MFC set to  0.000000
5/31/2011	10:12:10 AM	BCl3 MFC set to  0.000000
5/31/2011	10:12:10 AM	PHl3 MFC set to  0.000000
5/31/2011	10:12:10 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:12:10 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:12:10 AM	Tube furnace set to 0
5/31/2011	10:13:10 AM	Helium valve closed
5/31/2011	10:13:10 AM	H2 valve closed
5/31/2011	10:13:10 AM	BCl3 valve closed
5/31/2011	10:13:10 AM	PH3 valve closed
5/31/2011	10:13:10 AM	SiCl4 pre valve closed
5/31/2011	10:13:10 AM	SiCl4 post valve closed
5/31/2011	10:13:10 AM	Bubbler valve closed
5/31/2011	10:13:10 AM	Main Vac valve opened
5/31/2011	10:13:10 AM	Bypass valve opened
5/31/2011	10:13:10 AM	Helium MFC set to  0.000000
5/31/2011	10:13:10 AM	H2 MFC set to  0.000000
5/31/2011	10:13:10 AM	BCl3 MFC set to  0.000000
5/31/2011	10:13:10 AM	PHl3 MFC set to  0.000000
5/31/2011	10:13:10 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:13:10 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:13:11 AM	Tube furnace set to 0
5/31/2011	10:14:11 AM	H2 valve closed
5/31/2011	10:14:11 AM	BCl3 valve closed
5/31/2011	10:14:11 AM	PH3 valve closed
5/31/2011	10:14:11 AM	SiCl4 pre valve closed
5/31/2011	10:14:11 AM	SiCl4 post valve closed
5/31/2011	10:14:11 AM	Bubbler valve closed
5/31/2011	10:14:11 AM	Helium valve opened
5/31/2011	10:14:11 AM	Main Vac valve opened
5/31/2011	10:14:11 AM	Bypass valve opened
5/31/2011	10:14:11 AM	Helium MFC set to  100.000000
5/31/2011	10:14:11 AM	H2 MFC set to  0.000000
5/31/2011	10:14:11 AM	BCl3 MFC set to  0.000000
5/31/2011	10:14:11 AM	PHl3 MFC set to  0.000000
5/31/2011	10:14:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:14:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:14:11 AM	Tube furnace set to 0
5/31/2011	10:15:11 AM	Helium valve closed
5/31/2011	10:15:11 AM	H2 valve closed
5/31/2011	10:15:11 AM	BCl3 valve closed
5/31/2011	10:15:11 AM	PH3 valve closed
5/31/2011	10:15:11 AM	SiCl4 pre valve closed
5/31/2011	10:15:11 AM	SiCl4 post valve closed
5/31/2011	10:15:11 AM	Bubbler valve closed
5/31/2011	10:15:11 AM	Main Vac valve opened
5/31/2011	10:15:11 AM	Bypass valve opened
5/31/2011	10:15:11 AM	Helium MFC set to  0.000000
5/31/2011	10:15:11 AM	H2 MFC set to  0.000000
5/31/2011	10:15:11 AM	BCl3 MFC set to  0.000000
5/31/2011	10:15:11 AM	PHl3 MFC set to  0.000000
5/31/2011	10:15:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:15:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:15:11 AM	Tube furnace set to 0
5/31/2011	10:16:11 AM	H2 valve closed
5/31/2011	10:16:11 AM	BCl3 valve closed
5/31/2011	10:16:11 AM	PH3 valve closed
5/31/2011	10:16:11 AM	SiCl4 pre valve closed
5/31/2011	10:16:11 AM	SiCl4 post valve closed
5/31/2011	10:16:11 AM	Bubbler valve closed
5/31/2011	10:16:11 AM	Helium valve opened
5/31/2011	10:16:11 AM	Main Vac valve opened
5/31/2011	10:16:11 AM	Bypass valve opened
5/31/2011	10:16:11 AM	Helium MFC set to  100.000000
5/31/2011	10:16:11 AM	H2 MFC set to  0.000000
5/31/2011	10:16:11 AM	BCl3 MFC set to  0.000000
5/31/2011	10:16:11 AM	PHl3 MFC set to  0.000000
5/31/2011	10:16:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:16:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:16:11 AM	Tube furnace set to 0
5/31/2011	10:17:11 AM	Helium valve closed
5/31/2011	10:17:11 AM	H2 valve closed
5/31/2011	10:17:11 AM	BCl3 valve closed
5/31/2011	10:17:11 AM	PH3 valve closed
5/31/2011	10:17:11 AM	SiCl4 pre valve closed
5/31/2011	10:17:11 AM	SiCl4 post valve closed
5/31/2011	10:17:11 AM	Bubbler valve closed
5/31/2011	10:17:11 AM	Main Vac valve opened
5/31/2011	10:17:11 AM	Bypass valve opened
5/31/2011	10:17:11 AM	Helium MFC set to  0.000000
5/31/2011	10:17:11 AM	H2 MFC set to  0.000000
5/31/2011	10:17:11 AM	BCl3 MFC set to  0.000000
5/31/2011	10:17:11 AM	PHl3 MFC set to  0.000000
5/31/2011	10:17:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:17:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:17:11 AM	Tube furnace set to 0
5/31/2011	10:18:11 AM	H2 valve closed
5/31/2011	10:18:11 AM	BCl3 valve closed
5/31/2011	10:18:11 AM	PH3 valve closed
5/31/2011	10:18:11 AM	SiCl4 pre valve closed
5/31/2011	10:18:11 AM	SiCl4 post valve closed
5/31/2011	10:18:11 AM	Bubbler valve closed
5/31/2011	10:18:11 AM	Helium valve opened
5/31/2011	10:18:11 AM	Main Vac valve opened
5/31/2011	10:18:11 AM	Bypass valve opened
5/31/2011	10:18:11 AM	Helium MFC set to  100.000000
5/31/2011	10:18:11 AM	H2 MFC set to  0.000000
5/31/2011	10:18:11 AM	BCl3 MFC set to  0.000000
5/31/2011	10:18:11 AM	PHl3 MFC set to  0.000000
5/31/2011	10:18:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:18:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:18:12 AM	Tube furnace set to 0
5/31/2011	10:19:12 AM	Helium valve closed
5/31/2011	10:19:12 AM	H2 valve closed
5/31/2011	10:19:12 AM	BCl3 valve closed
5/31/2011	10:19:12 AM	PH3 valve closed
5/31/2011	10:19:12 AM	SiCl4 pre valve closed
5/31/2011	10:19:12 AM	SiCl4 post valve closed
5/31/2011	10:19:12 AM	Bubbler valve closed
5/31/2011	10:19:12 AM	Main Vac valve opened
5/31/2011	10:19:12 AM	Bypass valve opened
5/31/2011	10:19:12 AM	Helium MFC set to  0.000000
5/31/2011	10:19:12 AM	H2 MFC set to  0.000000
5/31/2011	10:19:12 AM	BCl3 MFC set to  0.000000
5/31/2011	10:19:12 AM	PHl3 MFC set to  0.000000
5/31/2011	10:19:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:19:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:19:12 AM	Tube furnace set to 0
5/31/2011	10:20:12 AM	H2 valve closed
5/31/2011	10:20:12 AM	BCl3 valve closed
5/31/2011	10:20:12 AM	PH3 valve closed
5/31/2011	10:20:12 AM	SiCl4 pre valve closed
5/31/2011	10:20:12 AM	SiCl4 post valve closed
5/31/2011	10:20:12 AM	Bubbler valve closed
5/31/2011	10:20:12 AM	Helium valve opened
5/31/2011	10:20:12 AM	Main Vac valve opened
5/31/2011	10:20:12 AM	Bypass valve opened
5/31/2011	10:20:12 AM	Helium MFC set to  100.000000
5/31/2011	10:20:12 AM	H2 MFC set to  0.000000
5/31/2011	10:20:12 AM	BCl3 MFC set to  0.000000
5/31/2011	10:20:12 AM	PHl3 MFC set to  0.000000
5/31/2011	10:20:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:20:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:20:12 AM	Tube furnace set to 0
5/31/2011	10:21:12 AM	Helium valve closed
5/31/2011	10:21:12 AM	H2 valve closed
5/31/2011	10:21:12 AM	BCl3 valve closed
5/31/2011	10:21:12 AM	PH3 valve closed
5/31/2011	10:21:12 AM	SiCl4 pre valve closed
5/31/2011	10:21:12 AM	SiCl4 post valve closed
5/31/2011	10:21:12 AM	Bubbler valve closed
5/31/2011	10:21:12 AM	Main Vac valve opened
5/31/2011	10:21:12 AM	Bypass valve opened
5/31/2011	10:21:12 AM	Helium MFC set to  0.000000
5/31/2011	10:21:12 AM	H2 MFC set to  0.000000
5/31/2011	10:21:12 AM	BCl3 MFC set to  0.000000
5/31/2011	10:21:12 AM	PHl3 MFC set to  0.000000
5/31/2011	10:21:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:21:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:21:12 AM	Tube furnace set to 0
5/31/2011	10:21:58 AM	H2 valve closed
5/31/2011	10:21:58 AM	BCl3 valve closed
5/31/2011	10:21:58 AM	PH3 valve closed
5/31/2011	10:21:58 AM	SiCl4 pre valve closed
5/31/2011	10:21:58 AM	SiCl4 post valve closed
5/31/2011	10:21:58 AM	Bubbler valve closed
5/31/2011	10:21:58 AM	Helium valve opened
5/31/2011	10:21:58 AM	Main Vac valve opened
5/31/2011	10:21:58 AM	Bypass valve opened
5/31/2011	10:21:58 AM	Helium MFC set to  100.000000
5/31/2011	10:21:58 AM	H2 MFC set to  0.000000
5/31/2011	10:21:58 AM	BCl3 MFC set to  0.000000
5/31/2011	10:21:58 AM	PHl3 MFC set to  0.000000
5/31/2011	10:21:58 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:21:58 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:21:58 AM	Tube furnace set to 0
5/31/2011	10:22:58 AM	Helium valve closed
5/31/2011	10:22:58 AM	H2 valve closed
5/31/2011	10:22:58 AM	BCl3 valve closed
5/31/2011	10:22:58 AM	PH3 valve closed
5/31/2011	10:22:58 AM	SiCl4 pre valve closed
5/31/2011	10:22:58 AM	SiCl4 post valve closed
5/31/2011	10:22:58 AM	Bubbler valve closed
5/31/2011	10:22:58 AM	Main Vac valve opened
5/31/2011	10:22:58 AM	Bypass valve opened
5/31/2011	10:22:58 AM	Helium MFC set to  0.000000
5/31/2011	10:22:58 AM	H2 MFC set to  0.000000
5/31/2011	10:22:58 AM	BCl3 MFC set to  0.000000
5/31/2011	10:22:58 AM	PHl3 MFC set to  0.000000
5/31/2011	10:22:58 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:22:58 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:22:59 AM	Tube furnace set to 0
5/31/2011	10:23:30 AM	H2 valve closed
5/31/2011	10:23:30 AM	BCl3 valve closed
5/31/2011	10:23:30 AM	PH3 valve closed
5/31/2011	10:23:30 AM	SiCl4 pre valve closed
5/31/2011	10:23:30 AM	SiCl4 post valve closed
5/31/2011	10:23:30 AM	Bubbler valve closed
5/31/2011	10:23:30 AM	Helium valve opened
5/31/2011	10:23:30 AM	Main Vac valve opened
5/31/2011	10:23:30 AM	Bypass valve opened
5/31/2011	10:23:30 AM	Helium MFC set to  100.000000
5/31/2011	10:23:30 AM	H2 MFC set to  0.000000
5/31/2011	10:23:30 AM	BCl3 MFC set to  0.000000
5/31/2011	10:23:30 AM	PHl3 MFC set to  0.000000
5/31/2011	10:23:30 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:23:30 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:23:30 AM	Tube furnace set to 0
5/31/2011	10:24:30 AM	Helium valve closed
5/31/2011	10:24:30 AM	H2 valve closed
5/31/2011	10:24:30 AM	BCl3 valve closed
5/31/2011	10:24:30 AM	PH3 valve closed
5/31/2011	10:24:30 AM	SiCl4 pre valve closed
5/31/2011	10:24:30 AM	SiCl4 post valve closed
5/31/2011	10:24:30 AM	Bubbler valve closed
5/31/2011	10:24:30 AM	Main Vac valve opened
5/31/2011	10:24:30 AM	Bypass valve opened
5/31/2011	10:24:30 AM	Helium MFC set to  0.000000
5/31/2011	10:24:30 AM	H2 MFC set to  0.000000
5/31/2011	10:24:30 AM	BCl3 MFC set to  0.000000
5/31/2011	10:24:30 AM	PHl3 MFC set to  0.000000
5/31/2011	10:24:30 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:24:30 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:24:30 AM	Tube furnace set to 0
5/31/2011	10:24:31 AM	Run finished at 10:24 AM
5/31/2011	10:24:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	10:26:39 AM	Tube furnace set to 200
5/31/2011	10:26:46 AM	Helium MFC set to  50.000000
5/31/2011	10:26:47 AM	Helium valve opened
5/31/2011	10:27:37 AM	Helium MFC set to  0.000000
5/31/2011	10:27:39 AM	Helium valve closed
5/31/2011	10:29:02 AM	Helium MFC set to  50.000000
5/31/2011	10:29:03 AM	Helium valve opened
5/31/2011	10:30:56 AM	Helium valve closed
5/31/2011	10:31:00 AM	Helium MFC set to  0.000000
5/31/2011	10:31:33 AM	Main Vac valve closed
5/31/2011	10:31:34 AM	Bypass valve closed
5/31/2011	10:31:55 AM	Bypass valve opened
5/31/2011	10:31:56 AM	Main Vac valve opened
5/31/2011	10:32:13 AM	Helium MFC set to  60.000000
5/31/2011	10:32:15 AM	Tube furnace set to 0
5/31/2011	10:32:18 AM	Helium valve opened
5/31/2011	10:32:59 AM	Helium valve closed
5/31/2011	10:33:02 AM	Helium MFC set to  0.000000
5/31/2011	10:33:46 AM	Recipe started at 10:33 AM
5/31/2011	10:33:46 AM	Helium valve closed
5/31/2011	10:33:46 AM	BCl3 valve closed
5/31/2011	10:33:46 AM	PH3 valve closed
5/31/2011	10:33:46 AM	SiCl4 pre valve closed
5/31/2011	10:33:46 AM	SiCl4 post valve closed
5/31/2011	10:33:46 AM	Main Vac valve closed
5/31/2011	10:33:46 AM	Bypass valve closed
5/31/2011	10:33:46 AM	Bubbler valve closed
5/31/2011	10:33:46 AM	H2 valve opened
5/31/2011	10:33:46 AM	Helium MFC set to  0.000000
5/31/2011	10:33:46 AM	H2 MFC set to  500.000000
5/31/2011	10:33:46 AM	BCl3 MFC set to  0.000000
5/31/2011	10:33:46 AM	PHl3 MFC set to  0.000000
5/31/2011	10:33:46 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:33:46 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:33:46 AM	Tube furnace set to 200
5/31/2011	10:35:04 AM	Helium valve closed
5/31/2011	10:35:04 AM	BCl3 valve closed
5/31/2011	10:35:04 AM	PH3 valve closed
5/31/2011	10:35:04 AM	SiCl4 pre valve closed
5/31/2011	10:35:04 AM	SiCl4 post valve closed
5/31/2011	10:35:04 AM	Main Vac valve closed
5/31/2011	10:35:04 AM	Bypass valve closed
5/31/2011	10:35:04 AM	H2 valve opened
5/31/2011	10:35:04 AM	Bubbler valve opened
5/31/2011	10:35:04 AM	Helium MFC set to  0.000000
5/31/2011	10:35:04 AM	H2 MFC set to  400.000000
5/31/2011	10:35:04 AM	BCl3 MFC set to  0.000000
5/31/2011	10:35:04 AM	PHl3 MFC set to  0.000000
5/31/2011	10:35:04 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:35:04 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:35:04 AM	Tube furnace set to 1000
5/31/2011	10:55:04 AM	Helium valve closed
5/31/2011	10:55:04 AM	PH3 valve closed
5/31/2011	10:55:04 AM	Main Vac valve closed
5/31/2011	10:55:04 AM	Bypass valve closed
5/31/2011	10:55:04 AM	H2 valve opened
5/31/2011	10:55:04 AM	BCl3 valve opened
5/31/2011	10:55:04 AM	SiCl4 pre valve opened
5/31/2011	10:55:04 AM	SiCl4 post valve opened
5/31/2011	10:55:04 AM	Bubbler valve opened
5/31/2011	10:55:04 AM	Helium MFC set to  0.000000
5/31/2011	10:55:04 AM	H2 MFC set to  500.000000
5/31/2011	10:55:04 AM	BCl3 MFC set to  3.000000
5/31/2011	10:55:04 AM	PHl3 MFC set to  0.000000
5/31/2011	10:55:04 AM	SiCl4 MFC set to  50.000000
5/31/2011	10:55:04 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:55:05 AM	Tube furnace set to 1000
5/31/2011	10:58:05 AM	H2 valve closed
5/31/2011	10:58:05 AM	BCl3 valve closed
5/31/2011	10:58:05 AM	PH3 valve closed
5/31/2011	10:58:05 AM	SiCl4 pre valve closed
5/31/2011	10:58:05 AM	SiCl4 post valve closed
5/31/2011	10:58:05 AM	Main Vac valve closed
5/31/2011	10:58:05 AM	Bypass valve closed
5/31/2011	10:58:05 AM	Helium valve opened
5/31/2011	10:58:05 AM	Bubbler valve opened
5/31/2011	10:58:05 AM	Helium MFC set to  400.000000
5/31/2011	10:58:05 AM	H2 MFC set to  0.000000
5/31/2011	10:58:05 AM	BCl3 MFC set to  0.000000
5/31/2011	10:58:05 AM	PHl3 MFC set to  0.000000
5/31/2011	10:58:05 AM	SiCl4 MFC set to  0.000000
5/31/2011	10:58:05 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	10:58:05 AM	Tube furnace set to 0
5/31/2011	11:18:05 AM	Helium valve closed
5/31/2011	11:18:05 AM	H2 valve closed
5/31/2011	11:18:05 AM	BCl3 valve closed
5/31/2011	11:18:05 AM	PH3 valve closed
5/31/2011	11:18:05 AM	SiCl4 pre valve closed
5/31/2011	11:18:05 AM	SiCl4 post valve closed
5/31/2011	11:18:05 AM	Main Vac valve closed
5/31/2011	11:18:05 AM	Bypass valve closed
5/31/2011	11:18:05 AM	Bubbler valve closed
5/31/2011	11:18:05 AM	Helium MFC set to  0.000000
5/31/2011	11:18:05 AM	H2 MFC set to  0.000000
5/31/2011	11:18:05 AM	BCl3 MFC set to  0.000000
5/31/2011	11:18:05 AM	PHl3 MFC set to  0.000000
5/31/2011	11:18:05 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:18:05 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:18:05 AM	Tube furnace set to 0
5/31/2011	11:18:05 AM	Run finished at 11:18 AM
5/31/2011	11:20:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	11:20:08 AM	Recipe started at 11:20 AM
5/31/2011	11:20:08 AM	Helium valve closed
5/31/2011	11:20:08 AM	H2 valve closed
5/31/2011	11:20:08 AM	BCl3 valve closed
5/31/2011	11:20:08 AM	PH3 valve closed
5/31/2011	11:20:08 AM	SiCl4 pre valve closed
5/31/2011	11:20:08 AM	SiCl4 post valve closed
5/31/2011	11:20:08 AM	Main Vac valve closed
5/31/2011	11:20:08 AM	Bubbler valve closed
5/31/2011	11:20:08 AM	Bypass valve opened
5/31/2011	11:20:08 AM	Helium MFC set to  0.000000
5/31/2011	11:20:08 AM	H2 MFC set to  0.000000
5/31/2011	11:20:08 AM	BCl3 MFC set to  0.000000
5/31/2011	11:20:08 AM	PHl3 MFC set to  0.000000
5/31/2011	11:20:08 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:20:08 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:20:08 AM	Tube furnace set to 0
5/31/2011	11:20:13 AM	Run aborted at 11:20 AM
5/31/2011	11:20:13 AM	Helium valve closed
5/31/2011	11:20:13 AM	H2 valve closed
5/31/2011	11:20:13 AM	BCl3 valve closed
5/31/2011	11:20:13 AM	PH3 valve closed
5/31/2011	11:20:13 AM	SiCl4 pre valve closed
5/31/2011	11:20:13 AM	SiCl4 post valve closed
5/31/2011	11:20:13 AM	Bypass valve closed
5/31/2011	11:20:13 AM	Main Vac valve closed
5/31/2011	11:20:13 AM	Bubbler valve closed
5/31/2011	11:20:13 AM	Helium MFC set to  0.000000
5/31/2011	11:20:13 AM	H2 MFC set to  0.000000
5/31/2011	11:20:13 AM	BCl3 MFC set to  0.000000
5/31/2011	11:20:13 AM	PHl3 MFC set to  0.000000
5/31/2011	11:20:13 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:20:13 AM	Tube furnace set to 0
5/31/2011	11:20:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	11:20:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	11:20:16 AM	Recipe started at 11:20 AM
5/31/2011	11:20:16 AM	H2 valve closed
5/31/2011	11:20:16 AM	BCl3 valve closed
5/31/2011	11:20:16 AM	PH3 valve closed
5/31/2011	11:20:16 AM	SiCl4 pre valve closed
5/31/2011	11:20:16 AM	SiCl4 post valve closed
5/31/2011	11:20:16 AM	Main Vac valve closed
5/31/2011	11:20:16 AM	Bypass valve closed
5/31/2011	11:20:16 AM	Bubbler valve closed
5/31/2011	11:20:16 AM	Helium valve opened
5/31/2011	11:20:16 AM	Helium MFC set to  500.000000
5/31/2011	11:20:16 AM	H2 MFC set to  0.000000
5/31/2011	11:20:16 AM	BCl3 MFC set to  0.000000
5/31/2011	11:20:16 AM	PHl3 MFC set to  0.000000
5/31/2011	11:20:16 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:20:16 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:20:16 AM	Tube furnace set to 0
5/31/2011	11:21:00 AM	Helium valve closed
5/31/2011	11:21:00 AM	H2 valve closed
5/31/2011	11:21:00 AM	BCl3 valve closed
5/31/2011	11:21:00 AM	PH3 valve closed
5/31/2011	11:21:00 AM	SiCl4 pre valve closed
5/31/2011	11:21:00 AM	SiCl4 post valve closed
5/31/2011	11:21:00 AM	Main Vac valve closed
5/31/2011	11:21:00 AM	Bypass valve closed
5/31/2011	11:21:00 AM	Bubbler valve closed
5/31/2011	11:21:00 AM	Helium MFC set to  0.000000
5/31/2011	11:21:00 AM	H2 MFC set to  0.000000
5/31/2011	11:21:00 AM	BCl3 MFC set to  0.000000
5/31/2011	11:21:00 AM	PHl3 MFC set to  0.000000
5/31/2011	11:21:00 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:21:00 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:21:01 AM	Tube furnace set to 0
5/31/2011	11:21:01 AM	Run finished at 11:21 AM
5/31/2011	11:21:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	11:27:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	11:27:36 AM	Recipe started at 11:27 AM
5/31/2011	11:27:36 AM	H2 valve closed
5/31/2011	11:27:36 AM	BCl3 valve closed
5/31/2011	11:27:36 AM	PH3 valve closed
5/31/2011	11:27:36 AM	SiCl4 pre valve closed
5/31/2011	11:27:36 AM	SiCl4 post valve closed
5/31/2011	11:27:36 AM	Main Vac valve closed
5/31/2011	11:27:36 AM	Bypass valve closed
5/31/2011	11:27:36 AM	Bubbler valve closed
5/31/2011	11:27:36 AM	Helium valve opened
5/31/2011	11:27:36 AM	Helium MFC set to  500.000000
5/31/2011	11:27:36 AM	H2 MFC set to  0.000000
5/31/2011	11:27:36 AM	BCl3 MFC set to  0.000000
5/31/2011	11:27:36 AM	PHl3 MFC set to  0.000000
5/31/2011	11:27:36 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:27:36 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:27:37 AM	Tube furnace set to 0
5/31/2011	11:27:41 AM	Helium valve closed
5/31/2011	11:27:41 AM	H2 valve closed
5/31/2011	11:27:41 AM	BCl3 valve closed
5/31/2011	11:27:41 AM	PH3 valve closed
5/31/2011	11:27:41 AM	SiCl4 pre valve closed
5/31/2011	11:27:41 AM	SiCl4 post valve closed
5/31/2011	11:27:41 AM	Main Vac valve closed
5/31/2011	11:27:41 AM	Bypass valve closed
5/31/2011	11:27:41 AM	Bubbler valve closed
5/31/2011	11:27:41 AM	Helium MFC set to  0.000000
5/31/2011	11:27:41 AM	H2 MFC set to  0.000000
5/31/2011	11:27:41 AM	BCl3 MFC set to  0.000000
5/31/2011	11:27:41 AM	PHl3 MFC set to  0.000000
5/31/2011	11:27:41 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:27:41 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:27:41 AM	Tube furnace set to 0
5/31/2011	11:27:42 AM	Run finished at 11:27 AM
5/31/2011	11:27:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	11:30:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	11:30:07 AM	Recipe started at 11:30 AM
5/31/2011	11:30:07 AM	Helium valve closed
5/31/2011	11:30:07 AM	H2 valve closed
5/31/2011	11:30:07 AM	BCl3 valve closed
5/31/2011	11:30:07 AM	PH3 valve closed
5/31/2011	11:30:07 AM	SiCl4 pre valve closed
5/31/2011	11:30:07 AM	SiCl4 post valve closed
5/31/2011	11:30:07 AM	Main Vac valve closed
5/31/2011	11:30:07 AM	Bubbler valve closed
5/31/2011	11:30:07 AM	Bypass valve opened
5/31/2011	11:30:07 AM	Helium MFC set to  0.000000
5/31/2011	11:30:07 AM	H2 MFC set to  0.000000
5/31/2011	11:30:07 AM	BCl3 MFC set to  0.000000
5/31/2011	11:30:07 AM	PHl3 MFC set to  0.000000
5/31/2011	11:30:07 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:30:07 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:30:07 AM	Tube furnace set to 0
5/31/2011	11:30:38 AM	Helium valve closed
5/31/2011	11:30:38 AM	H2 valve closed
5/31/2011	11:30:38 AM	BCl3 valve closed
5/31/2011	11:30:38 AM	PH3 valve closed
5/31/2011	11:30:38 AM	SiCl4 pre valve closed
5/31/2011	11:30:38 AM	SiCl4 post valve closed
5/31/2011	11:30:38 AM	Bubbler valve closed
5/31/2011	11:30:38 AM	Main Vac valve opened
5/31/2011	11:30:38 AM	Bypass valve opened
5/31/2011	11:30:38 AM	Helium MFC set to  0.000000
5/31/2011	11:30:38 AM	H2 MFC set to  0.000000
5/31/2011	11:30:38 AM	BCl3 MFC set to  0.000000
5/31/2011	11:30:38 AM	PHl3 MFC set to  0.000000
5/31/2011	11:30:38 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:30:38 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:30:38 AM	Tube furnace set to 0
5/31/2011	11:30:39 AM	Run finished at 11:30 AM
5/31/2011	11:30:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	11:36:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	11:36:40 AM	Recipe started at 11:36 AM
5/31/2011	11:36:40 AM	H2 valve closed
5/31/2011	11:36:40 AM	BCl3 valve closed
5/31/2011	11:36:40 AM	PH3 valve closed
5/31/2011	11:36:40 AM	SiCl4 pre valve closed
5/31/2011	11:36:40 AM	SiCl4 post valve closed
5/31/2011	11:36:40 AM	Main Vac valve closed
5/31/2011	11:36:40 AM	Bypass valve closed
5/31/2011	11:36:40 AM	Bubbler valve closed
5/31/2011	11:36:40 AM	Helium valve opened
5/31/2011	11:36:40 AM	Helium MFC set to  500.000000
5/31/2011	11:36:40 AM	H2 MFC set to  0.000000
5/31/2011	11:36:40 AM	BCl3 MFC set to  0.000000
5/31/2011	11:36:40 AM	PHl3 MFC set to  0.000000
5/31/2011	11:36:40 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:36:40 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:36:40 AM	Tube furnace set to 0
5/31/2011	11:37:55 AM	Helium valve closed
5/31/2011	11:37:55 AM	H2 valve closed
5/31/2011	11:37:55 AM	BCl3 valve closed
5/31/2011	11:37:55 AM	PH3 valve closed
5/31/2011	11:37:55 AM	SiCl4 pre valve closed
5/31/2011	11:37:55 AM	SiCl4 post valve closed
5/31/2011	11:37:55 AM	Main Vac valve closed
5/31/2011	11:37:55 AM	Bypass valve closed
5/31/2011	11:37:55 AM	Bubbler valve closed
5/31/2011	11:37:55 AM	Helium MFC set to  0.000000
5/31/2011	11:37:55 AM	H2 MFC set to  0.000000
5/31/2011	11:37:55 AM	BCl3 MFC set to  0.000000
5/31/2011	11:37:55 AM	PHl3 MFC set to  0.000000
5/31/2011	11:37:55 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:37:55 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:37:55 AM	Tube furnace set to 0
5/31/2011	11:37:55 AM	Run finished at 11:37 AM
5/31/2011	11:37:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	11:42:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	11:42:40 AM	Recipe started at 11:42 AM
5/31/2011	11:42:40 AM	Helium valve closed
5/31/2011	11:42:40 AM	H2 valve closed
5/31/2011	11:42:40 AM	BCl3 valve closed
5/31/2011	11:42:40 AM	PH3 valve closed
5/31/2011	11:42:40 AM	SiCl4 pre valve closed
5/31/2011	11:42:40 AM	SiCl4 post valve closed
5/31/2011	11:42:40 AM	Main Vac valve closed
5/31/2011	11:42:40 AM	Bubbler valve closed
5/31/2011	11:42:40 AM	Bypass valve opened
5/31/2011	11:42:40 AM	Helium MFC set to  0.000000
5/31/2011	11:42:40 AM	H2 MFC set to  0.000000
5/31/2011	11:42:40 AM	BCl3 MFC set to  0.000000
5/31/2011	11:42:40 AM	PHl3 MFC set to  0.000000
5/31/2011	11:42:40 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:42:40 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:42:40 AM	Tube furnace set to 0
5/31/2011	11:43:11 AM	Helium valve closed
5/31/2011	11:43:11 AM	H2 valve closed
5/31/2011	11:43:11 AM	BCl3 valve closed
5/31/2011	11:43:11 AM	PH3 valve closed
5/31/2011	11:43:11 AM	SiCl4 pre valve closed
5/31/2011	11:43:11 AM	SiCl4 post valve closed
5/31/2011	11:43:11 AM	Bubbler valve closed
5/31/2011	11:43:11 AM	Main Vac valve opened
5/31/2011	11:43:11 AM	Bypass valve opened
5/31/2011	11:43:11 AM	Helium MFC set to  0.000000
5/31/2011	11:43:11 AM	H2 MFC set to  0.000000
5/31/2011	11:43:11 AM	BCl3 MFC set to  0.000000
5/31/2011	11:43:11 AM	PHl3 MFC set to  0.000000
5/31/2011	11:43:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:43:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:43:11 AM	Tube furnace set to 0
5/31/2011	11:44:11 AM	H2 valve closed
5/31/2011	11:44:11 AM	BCl3 valve closed
5/31/2011	11:44:11 AM	PH3 valve closed
5/31/2011	11:44:11 AM	SiCl4 pre valve closed
5/31/2011	11:44:11 AM	SiCl4 post valve closed
5/31/2011	11:44:11 AM	Bubbler valve closed
5/31/2011	11:44:11 AM	Helium valve opened
5/31/2011	11:44:11 AM	Main Vac valve opened
5/31/2011	11:44:11 AM	Bypass valve opened
5/31/2011	11:44:11 AM	Helium MFC set to  100.000000
5/31/2011	11:44:11 AM	H2 MFC set to  0.000000
5/31/2011	11:44:11 AM	BCl3 MFC set to  0.000000
5/31/2011	11:44:11 AM	PHl3 MFC set to  0.000000
5/31/2011	11:44:11 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:44:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:44:12 AM	Tube furnace set to 0
5/31/2011	11:45:12 AM	Helium valve closed
5/31/2011	11:45:12 AM	H2 valve closed
5/31/2011	11:45:12 AM	BCl3 valve closed
5/31/2011	11:45:12 AM	PH3 valve closed
5/31/2011	11:45:12 AM	SiCl4 pre valve closed
5/31/2011	11:45:12 AM	SiCl4 post valve closed
5/31/2011	11:45:12 AM	Bubbler valve closed
5/31/2011	11:45:12 AM	Main Vac valve opened
5/31/2011	11:45:12 AM	Bypass valve opened
5/31/2011	11:45:12 AM	Helium MFC set to  0.000000
5/31/2011	11:45:12 AM	H2 MFC set to  0.000000
5/31/2011	11:45:12 AM	BCl3 MFC set to  0.000000
5/31/2011	11:45:12 AM	PHl3 MFC set to  0.000000
5/31/2011	11:45:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:45:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:45:12 AM	Tube furnace set to 0
5/31/2011	11:46:12 AM	H2 valve closed
5/31/2011	11:46:12 AM	BCl3 valve closed
5/31/2011	11:46:12 AM	PH3 valve closed
5/31/2011	11:46:12 AM	SiCl4 pre valve closed
5/31/2011	11:46:12 AM	SiCl4 post valve closed
5/31/2011	11:46:12 AM	Bubbler valve closed
5/31/2011	11:46:12 AM	Helium valve opened
5/31/2011	11:46:12 AM	Main Vac valve opened
5/31/2011	11:46:12 AM	Bypass valve opened
5/31/2011	11:46:12 AM	Helium MFC set to  100.000000
5/31/2011	11:46:12 AM	H2 MFC set to  0.000000
5/31/2011	11:46:12 AM	BCl3 MFC set to  0.000000
5/31/2011	11:46:12 AM	PHl3 MFC set to  0.000000
5/31/2011	11:46:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:46:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:46:12 AM	Tube furnace set to 0
5/31/2011	11:47:12 AM	Helium valve closed
5/31/2011	11:47:12 AM	H2 valve closed
5/31/2011	11:47:12 AM	BCl3 valve closed
5/31/2011	11:47:12 AM	PH3 valve closed
5/31/2011	11:47:12 AM	SiCl4 pre valve closed
5/31/2011	11:47:12 AM	SiCl4 post valve closed
5/31/2011	11:47:12 AM	Bubbler valve closed
5/31/2011	11:47:12 AM	Main Vac valve opened
5/31/2011	11:47:12 AM	Bypass valve opened
5/31/2011	11:47:12 AM	Helium MFC set to  0.000000
5/31/2011	11:47:12 AM	H2 MFC set to  0.000000
5/31/2011	11:47:12 AM	BCl3 MFC set to  0.000000
5/31/2011	11:47:12 AM	PHl3 MFC set to  0.000000
5/31/2011	11:47:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:47:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:47:12 AM	Tube furnace set to 0
5/31/2011	11:48:12 AM	H2 valve closed
5/31/2011	11:48:12 AM	BCl3 valve closed
5/31/2011	11:48:12 AM	PH3 valve closed
5/31/2011	11:48:12 AM	SiCl4 pre valve closed
5/31/2011	11:48:12 AM	SiCl4 post valve closed
5/31/2011	11:48:12 AM	Bubbler valve closed
5/31/2011	11:48:12 AM	Helium valve opened
5/31/2011	11:48:12 AM	Main Vac valve opened
5/31/2011	11:48:12 AM	Bypass valve opened
5/31/2011	11:48:12 AM	Helium MFC set to  100.000000
5/31/2011	11:48:12 AM	H2 MFC set to  0.000000
5/31/2011	11:48:12 AM	BCl3 MFC set to  0.000000
5/31/2011	11:48:12 AM	PHl3 MFC set to  0.000000
5/31/2011	11:48:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:48:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:48:12 AM	Tube furnace set to 0
5/31/2011	11:49:12 AM	Helium valve closed
5/31/2011	11:49:12 AM	H2 valve closed
5/31/2011	11:49:12 AM	BCl3 valve closed
5/31/2011	11:49:12 AM	PH3 valve closed
5/31/2011	11:49:12 AM	SiCl4 pre valve closed
5/31/2011	11:49:12 AM	SiCl4 post valve closed
5/31/2011	11:49:12 AM	Bubbler valve closed
5/31/2011	11:49:12 AM	Main Vac valve opened
5/31/2011	11:49:12 AM	Bypass valve opened
5/31/2011	11:49:12 AM	Helium MFC set to  0.000000
5/31/2011	11:49:12 AM	H2 MFC set to  0.000000
5/31/2011	11:49:12 AM	BCl3 MFC set to  0.000000
5/31/2011	11:49:12 AM	PHl3 MFC set to  0.000000
5/31/2011	11:49:12 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:49:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:49:13 AM	Tube furnace set to 0
5/31/2011	11:50:13 AM	H2 valve closed
5/31/2011	11:50:13 AM	BCl3 valve closed
5/31/2011	11:50:13 AM	PH3 valve closed
5/31/2011	11:50:13 AM	SiCl4 pre valve closed
5/31/2011	11:50:13 AM	SiCl4 post valve closed
5/31/2011	11:50:13 AM	Bubbler valve closed
5/31/2011	11:50:13 AM	Helium valve opened
5/31/2011	11:50:13 AM	Main Vac valve opened
5/31/2011	11:50:13 AM	Bypass valve opened
5/31/2011	11:50:13 AM	Helium MFC set to  100.000000
5/31/2011	11:50:13 AM	H2 MFC set to  0.000000
5/31/2011	11:50:13 AM	BCl3 MFC set to  0.000000
5/31/2011	11:50:13 AM	PHl3 MFC set to  0.000000
5/31/2011	11:50:13 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:50:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:50:13 AM	Tube furnace set to 0
5/31/2011	11:51:13 AM	Helium valve closed
5/31/2011	11:51:13 AM	H2 valve closed
5/31/2011	11:51:13 AM	BCl3 valve closed
5/31/2011	11:51:13 AM	PH3 valve closed
5/31/2011	11:51:13 AM	SiCl4 pre valve closed
5/31/2011	11:51:13 AM	SiCl4 post valve closed
5/31/2011	11:51:13 AM	Bubbler valve closed
5/31/2011	11:51:13 AM	Main Vac valve opened
5/31/2011	11:51:13 AM	Bypass valve opened
5/31/2011	11:51:13 AM	Helium MFC set to  0.000000
5/31/2011	11:51:13 AM	H2 MFC set to  0.000000
5/31/2011	11:51:13 AM	BCl3 MFC set to  0.000000
5/31/2011	11:51:13 AM	PHl3 MFC set to  0.000000
5/31/2011	11:51:13 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:51:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:51:13 AM	Tube furnace set to 0
5/31/2011	11:52:13 AM	H2 valve closed
5/31/2011	11:52:13 AM	BCl3 valve closed
5/31/2011	11:52:13 AM	PH3 valve closed
5/31/2011	11:52:13 AM	SiCl4 pre valve closed
5/31/2011	11:52:13 AM	SiCl4 post valve closed
5/31/2011	11:52:13 AM	Bubbler valve closed
5/31/2011	11:52:13 AM	Helium valve opened
5/31/2011	11:52:13 AM	Main Vac valve opened
5/31/2011	11:52:13 AM	Bypass valve opened
5/31/2011	11:52:13 AM	Helium MFC set to  100.000000
5/31/2011	11:52:13 AM	H2 MFC set to  0.000000
5/31/2011	11:52:13 AM	BCl3 MFC set to  0.000000
5/31/2011	11:52:13 AM	PHl3 MFC set to  0.000000
5/31/2011	11:52:13 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:52:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:52:13 AM	Tube furnace set to 0
5/31/2011	11:53:13 AM	Helium valve closed
5/31/2011	11:53:13 AM	H2 valve closed
5/31/2011	11:53:13 AM	BCl3 valve closed
5/31/2011	11:53:13 AM	PH3 valve closed
5/31/2011	11:53:13 AM	SiCl4 pre valve closed
5/31/2011	11:53:13 AM	SiCl4 post valve closed
5/31/2011	11:53:13 AM	Bubbler valve closed
5/31/2011	11:53:13 AM	Main Vac valve opened
5/31/2011	11:53:13 AM	Bypass valve opened
5/31/2011	11:53:13 AM	Helium MFC set to  0.000000
5/31/2011	11:53:13 AM	H2 MFC set to  0.000000
5/31/2011	11:53:13 AM	BCl3 MFC set to  0.000000
5/31/2011	11:53:13 AM	PHl3 MFC set to  0.000000
5/31/2011	11:53:13 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:53:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:53:13 AM	Tube furnace set to 0
5/31/2011	11:54:13 AM	H2 valve closed
5/31/2011	11:54:13 AM	BCl3 valve closed
5/31/2011	11:54:13 AM	PH3 valve closed
5/31/2011	11:54:13 AM	SiCl4 pre valve closed
5/31/2011	11:54:13 AM	SiCl4 post valve closed
5/31/2011	11:54:13 AM	Bubbler valve closed
5/31/2011	11:54:13 AM	Helium valve opened
5/31/2011	11:54:13 AM	Main Vac valve opened
5/31/2011	11:54:13 AM	Bypass valve opened
5/31/2011	11:54:13 AM	Helium MFC set to  100.000000
5/31/2011	11:54:13 AM	H2 MFC set to  0.000000
5/31/2011	11:54:13 AM	BCl3 MFC set to  0.000000
5/31/2011	11:54:13 AM	PHl3 MFC set to  0.000000
5/31/2011	11:54:13 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:54:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:54:14 AM	Tube furnace set to 0
5/31/2011	11:55:14 AM	Helium valve closed
5/31/2011	11:55:14 AM	H2 valve closed
5/31/2011	11:55:14 AM	BCl3 valve closed
5/31/2011	11:55:14 AM	PH3 valve closed
5/31/2011	11:55:14 AM	SiCl4 pre valve closed
5/31/2011	11:55:14 AM	SiCl4 post valve closed
5/31/2011	11:55:14 AM	Bubbler valve closed
5/31/2011	11:55:14 AM	Main Vac valve opened
5/31/2011	11:55:14 AM	Bypass valve opened
5/31/2011	11:55:14 AM	Helium MFC set to  0.000000
5/31/2011	11:55:14 AM	H2 MFC set to  0.000000
5/31/2011	11:55:14 AM	BCl3 MFC set to  0.000000
5/31/2011	11:55:14 AM	PHl3 MFC set to  0.000000
5/31/2011	11:55:14 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:55:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:55:14 AM	Tube furnace set to 0
5/31/2011	11:56:14 AM	H2 valve closed
5/31/2011	11:56:14 AM	BCl3 valve closed
5/31/2011	11:56:14 AM	PH3 valve closed
5/31/2011	11:56:14 AM	SiCl4 pre valve closed
5/31/2011	11:56:14 AM	SiCl4 post valve closed
5/31/2011	11:56:14 AM	Bubbler valve closed
5/31/2011	11:56:14 AM	Helium valve opened
5/31/2011	11:56:14 AM	Main Vac valve opened
5/31/2011	11:56:14 AM	Bypass valve opened
5/31/2011	11:56:14 AM	Helium MFC set to  100.000000
5/31/2011	11:56:14 AM	H2 MFC set to  0.000000
5/31/2011	11:56:14 AM	BCl3 MFC set to  0.000000
5/31/2011	11:56:14 AM	PHl3 MFC set to  0.000000
5/31/2011	11:56:14 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:56:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:56:14 AM	Tube furnace set to 0
5/31/2011	11:57:14 AM	Helium valve closed
5/31/2011	11:57:14 AM	H2 valve closed
5/31/2011	11:57:14 AM	BCl3 valve closed
5/31/2011	11:57:14 AM	PH3 valve closed
5/31/2011	11:57:14 AM	SiCl4 pre valve closed
5/31/2011	11:57:14 AM	SiCl4 post valve closed
5/31/2011	11:57:14 AM	Bubbler valve closed
5/31/2011	11:57:14 AM	Main Vac valve opened
5/31/2011	11:57:14 AM	Bypass valve opened
5/31/2011	11:57:14 AM	Helium MFC set to  0.000000
5/31/2011	11:57:14 AM	H2 MFC set to  0.000000
5/31/2011	11:57:14 AM	BCl3 MFC set to  0.000000
5/31/2011	11:57:14 AM	PHl3 MFC set to  0.000000
5/31/2011	11:57:14 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:57:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:57:14 AM	Tube furnace set to 0
5/31/2011	11:58:14 AM	H2 valve closed
5/31/2011	11:58:14 AM	BCl3 valve closed
5/31/2011	11:58:14 AM	PH3 valve closed
5/31/2011	11:58:14 AM	SiCl4 pre valve closed
5/31/2011	11:58:14 AM	SiCl4 post valve closed
5/31/2011	11:58:14 AM	Bubbler valve closed
5/31/2011	11:58:14 AM	Helium valve opened
5/31/2011	11:58:14 AM	Main Vac valve opened
5/31/2011	11:58:14 AM	Bypass valve opened
5/31/2011	11:58:14 AM	Helium MFC set to  100.000000
5/31/2011	11:58:14 AM	H2 MFC set to  0.000000
5/31/2011	11:58:14 AM	BCl3 MFC set to  0.000000
5/31/2011	11:58:14 AM	PHl3 MFC set to  0.000000
5/31/2011	11:58:14 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:58:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:58:14 AM	Tube furnace set to 0
5/31/2011	11:59:14 AM	Helium valve closed
5/31/2011	11:59:14 AM	H2 valve closed
5/31/2011	11:59:14 AM	BCl3 valve closed
5/31/2011	11:59:14 AM	PH3 valve closed
5/31/2011	11:59:14 AM	SiCl4 pre valve closed
5/31/2011	11:59:14 AM	SiCl4 post valve closed
5/31/2011	11:59:14 AM	Bubbler valve closed
5/31/2011	11:59:14 AM	Main Vac valve opened
5/31/2011	11:59:14 AM	Bypass valve opened
5/31/2011	11:59:14 AM	Helium MFC set to  0.000000
5/31/2011	11:59:14 AM	H2 MFC set to  0.000000
5/31/2011	11:59:14 AM	BCl3 MFC set to  0.000000
5/31/2011	11:59:14 AM	PHl3 MFC set to  0.000000
5/31/2011	11:59:14 AM	SiCl4 MFC set to  0.000000
5/31/2011	11:59:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2011	11:59:15 AM	Tube furnace set to 0
5/31/2011	12:00:15 PM	H2 valve closed
5/31/2011	12:00:15 PM	BCl3 valve closed
5/31/2011	12:00:15 PM	PH3 valve closed
5/31/2011	12:00:15 PM	SiCl4 pre valve closed
5/31/2011	12:00:15 PM	SiCl4 post valve closed
5/31/2011	12:00:15 PM	Bubbler valve closed
5/31/2011	12:00:15 PM	Helium valve opened
5/31/2011	12:00:15 PM	Main Vac valve opened
5/31/2011	12:00:15 PM	Bypass valve opened
5/31/2011	12:00:15 PM	Helium MFC set to  100.000000
5/31/2011	12:00:15 PM	H2 MFC set to  0.000000
5/31/2011	12:00:15 PM	BCl3 MFC set to  0.000000
5/31/2011	12:00:15 PM	PHl3 MFC set to  0.000000
5/31/2011	12:00:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	12:00:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	12:00:15 PM	Tube furnace set to 0
5/31/2011	12:01:15 PM	Helium valve closed
5/31/2011	12:01:15 PM	H2 valve closed
5/31/2011	12:01:15 PM	BCl3 valve closed
5/31/2011	12:01:15 PM	PH3 valve closed
5/31/2011	12:01:15 PM	SiCl4 pre valve closed
5/31/2011	12:01:15 PM	SiCl4 post valve closed
5/31/2011	12:01:15 PM	Bubbler valve closed
5/31/2011	12:01:15 PM	Main Vac valve opened
5/31/2011	12:01:15 PM	Bypass valve opened
5/31/2011	12:01:15 PM	Helium MFC set to  0.000000
5/31/2011	12:01:15 PM	H2 MFC set to  0.000000
5/31/2011	12:01:15 PM	BCl3 MFC set to  0.000000
5/31/2011	12:01:15 PM	PHl3 MFC set to  0.000000
5/31/2011	12:01:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	12:01:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	12:01:15 PM	Tube furnace set to 0
5/31/2011	12:02:15 PM	H2 valve closed
5/31/2011	12:02:15 PM	BCl3 valve closed
5/31/2011	12:02:15 PM	PH3 valve closed
5/31/2011	12:02:15 PM	SiCl4 pre valve closed
5/31/2011	12:02:15 PM	SiCl4 post valve closed
5/31/2011	12:02:15 PM	Bubbler valve closed
5/31/2011	12:02:15 PM	Helium valve opened
5/31/2011	12:02:15 PM	Main Vac valve opened
5/31/2011	12:02:15 PM	Bypass valve opened
5/31/2011	12:02:15 PM	Helium MFC set to  100.000000
5/31/2011	12:02:15 PM	H2 MFC set to  0.000000
5/31/2011	12:02:15 PM	BCl3 MFC set to  0.000000
5/31/2011	12:02:15 PM	PHl3 MFC set to  0.000000
5/31/2011	12:02:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	12:02:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	12:02:15 PM	Tube furnace set to 0
5/31/2011	12:03:15 PM	Helium valve closed
5/31/2011	12:03:15 PM	H2 valve closed
5/31/2011	12:03:15 PM	BCl3 valve closed
5/31/2011	12:03:15 PM	PH3 valve closed
5/31/2011	12:03:15 PM	SiCl4 pre valve closed
5/31/2011	12:03:15 PM	SiCl4 post valve closed
5/31/2011	12:03:15 PM	Bubbler valve closed
5/31/2011	12:03:15 PM	Main Vac valve opened
5/31/2011	12:03:15 PM	Bypass valve opened
5/31/2011	12:03:15 PM	Helium MFC set to  0.000000
5/31/2011	12:03:15 PM	H2 MFC set to  0.000000
5/31/2011	12:03:15 PM	BCl3 MFC set to  0.000000
5/31/2011	12:03:15 PM	PHl3 MFC set to  0.000000
5/31/2011	12:03:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	12:03:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	12:03:15 PM	Tube furnace set to 0
5/31/2011	12:03:16 PM	Run finished at 12:03 PM
5/31/2011	12:03:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	1:37:32 PM	Tube furnace set to 200
5/31/2011	1:37:35 PM	Helium MFC set to  50.000000
5/31/2011	1:37:38 PM	Helium valve opened
5/31/2011	1:38:15 PM	Helium valve closed
5/31/2011	1:38:17 PM	Helium MFC set to  0.000000
5/31/2011	1:38:59 PM	Main Vac valve closed
5/31/2011	1:39:01 PM	Bypass valve closed
5/31/2011	1:39:21 PM	Bypass valve opened
5/31/2011	1:39:22 PM	Main Vac valve opened
5/31/2011	1:39:37 PM	Recipe started at 1:39 PM
5/31/2011	1:39:37 PM	Helium valve closed
5/31/2011	1:39:37 PM	BCl3 valve closed
5/31/2011	1:39:37 PM	PH3 valve closed
5/31/2011	1:39:37 PM	SiCl4 pre valve closed
5/31/2011	1:39:37 PM	SiCl4 post valve closed
5/31/2011	1:39:37 PM	Main Vac valve closed
5/31/2011	1:39:37 PM	Bypass valve closed
5/31/2011	1:39:37 PM	Bubbler valve closed
5/31/2011	1:39:37 PM	H2 valve opened
5/31/2011	1:39:37 PM	Helium MFC set to  0.000000
5/31/2011	1:39:37 PM	H2 MFC set to  500.000000
5/31/2011	1:39:37 PM	BCl3 MFC set to  0.000000
5/31/2011	1:39:37 PM	PHl3 MFC set to  0.000000
5/31/2011	1:39:37 PM	SiCl4 MFC set to  0.000000
5/31/2011	1:39:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	1:39:37 PM	Tube furnace set to 200
5/31/2011	1:40:56 PM	Helium valve closed
5/31/2011	1:40:56 PM	BCl3 valve closed
5/31/2011	1:40:56 PM	PH3 valve closed
5/31/2011	1:40:56 PM	SiCl4 pre valve closed
5/31/2011	1:40:56 PM	SiCl4 post valve closed
5/31/2011	1:40:56 PM	Main Vac valve closed
5/31/2011	1:40:56 PM	Bypass valve closed
5/31/2011	1:40:56 PM	H2 valve opened
5/31/2011	1:40:56 PM	Bubbler valve opened
5/31/2011	1:40:56 PM	Helium MFC set to  0.000000
5/31/2011	1:40:56 PM	H2 MFC set to  400.000000
5/31/2011	1:40:56 PM	BCl3 MFC set to  0.000000
5/31/2011	1:40:56 PM	PHl3 MFC set to  0.000000
5/31/2011	1:40:56 PM	SiCl4 MFC set to  0.000000
5/31/2011	1:40:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	1:40:56 PM	Tube furnace set to 1000
5/31/2011	2:00:56 PM	Helium valve closed
5/31/2011	2:00:56 PM	PH3 valve closed
5/31/2011	2:00:56 PM	Main Vac valve closed
5/31/2011	2:00:56 PM	Bypass valve closed
5/31/2011	2:00:56 PM	H2 valve opened
5/31/2011	2:00:56 PM	BCl3 valve opened
5/31/2011	2:00:56 PM	SiCl4 pre valve opened
5/31/2011	2:00:56 PM	SiCl4 post valve opened
5/31/2011	2:00:56 PM	Bubbler valve opened
5/31/2011	2:00:56 PM	Helium MFC set to  0.000000
5/31/2011	2:00:56 PM	H2 MFC set to  400.000000
5/31/2011	2:00:56 PM	BCl3 MFC set to  2.400000
5/31/2011	2:00:56 PM	PHl3 MFC set to  0.000000
5/31/2011	2:00:56 PM	SiCl4 MFC set to  40.000000
5/31/2011	2:00:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:00:56 PM	Tube furnace set to 1000
5/31/2011	2:03:56 PM	H2 valve closed
5/31/2011	2:03:56 PM	BCl3 valve closed
5/31/2011	2:03:56 PM	PH3 valve closed
5/31/2011	2:03:56 PM	SiCl4 pre valve closed
5/31/2011	2:03:56 PM	SiCl4 post valve closed
5/31/2011	2:03:56 PM	Main Vac valve closed
5/31/2011	2:03:56 PM	Bypass valve closed
5/31/2011	2:03:56 PM	Helium valve opened
5/31/2011	2:03:56 PM	Bubbler valve opened
5/31/2011	2:03:56 PM	Helium MFC set to  400.000000
5/31/2011	2:03:56 PM	H2 MFC set to  0.000000
5/31/2011	2:03:56 PM	BCl3 MFC set to  0.000000
5/31/2011	2:03:56 PM	PHl3 MFC set to  0.000000
5/31/2011	2:03:56 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:03:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:03:56 PM	Tube furnace set to 0
5/31/2011	2:23:56 PM	Helium valve closed
5/31/2011	2:23:56 PM	H2 valve closed
5/31/2011	2:23:56 PM	BCl3 valve closed
5/31/2011	2:23:56 PM	PH3 valve closed
5/31/2011	2:23:56 PM	SiCl4 pre valve closed
5/31/2011	2:23:56 PM	SiCl4 post valve closed
5/31/2011	2:23:56 PM	Main Vac valve closed
5/31/2011	2:23:56 PM	Bypass valve closed
5/31/2011	2:23:56 PM	Bubbler valve closed
5/31/2011	2:23:56 PM	Helium MFC set to  0.000000
5/31/2011	2:23:56 PM	H2 MFC set to  0.000000
5/31/2011	2:23:56 PM	BCl3 MFC set to  0.000000
5/31/2011	2:23:56 PM	PHl3 MFC set to  0.000000
5/31/2011	2:23:56 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:23:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:23:56 PM	Tube furnace set to 0
5/31/2011	2:23:57 PM	Run finished at 2:23 PM
5/31/2011	2:30:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	2:30:19 PM	Recipe started at 2:30 PM
5/31/2011	2:30:19 PM	Helium valve closed
5/31/2011	2:30:19 PM	H2 valve closed
5/31/2011	2:30:19 PM	BCl3 valve closed
5/31/2011	2:30:19 PM	PH3 valve closed
5/31/2011	2:30:19 PM	SiCl4 pre valve closed
5/31/2011	2:30:19 PM	SiCl4 post valve closed
5/31/2011	2:30:19 PM	Main Vac valve closed
5/31/2011	2:30:19 PM	Bubbler valve closed
5/31/2011	2:30:19 PM	Bypass valve opened
5/31/2011	2:30:19 PM	Helium MFC set to  0.000000
5/31/2011	2:30:19 PM	H2 MFC set to  0.000000
5/31/2011	2:30:19 PM	BCl3 MFC set to  0.000000
5/31/2011	2:30:19 PM	PHl3 MFC set to  0.000000
5/31/2011	2:30:19 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:30:19 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:30:19 PM	Tube furnace set to 0
5/31/2011	2:30:52 PM	Helium valve closed
5/31/2011	2:30:52 PM	H2 valve closed
5/31/2011	2:30:52 PM	BCl3 valve closed
5/31/2011	2:30:52 PM	PH3 valve closed
5/31/2011	2:30:52 PM	SiCl4 pre valve closed
5/31/2011	2:30:52 PM	SiCl4 post valve closed
5/31/2011	2:30:52 PM	Bubbler valve closed
5/31/2011	2:30:52 PM	Main Vac valve opened
5/31/2011	2:30:52 PM	Bypass valve opened
5/31/2011	2:30:52 PM	Helium MFC set to  0.000000
5/31/2011	2:30:52 PM	H2 MFC set to  0.000000
5/31/2011	2:30:52 PM	BCl3 MFC set to  0.000000
5/31/2011	2:30:52 PM	PHl3 MFC set to  0.000000
5/31/2011	2:30:52 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:30:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:30:52 PM	Tube furnace set to 0
5/31/2011	2:31:52 PM	H2 valve closed
5/31/2011	2:31:52 PM	BCl3 valve closed
5/31/2011	2:31:52 PM	PH3 valve closed
5/31/2011	2:31:52 PM	SiCl4 pre valve closed
5/31/2011	2:31:52 PM	SiCl4 post valve closed
5/31/2011	2:31:52 PM	Bubbler valve closed
5/31/2011	2:31:52 PM	Helium valve opened
5/31/2011	2:31:52 PM	Main Vac valve opened
5/31/2011	2:31:52 PM	Bypass valve opened
5/31/2011	2:31:52 PM	Helium MFC set to  100.000000
5/31/2011	2:31:52 PM	H2 MFC set to  0.000000
5/31/2011	2:31:52 PM	BCl3 MFC set to  0.000000
5/31/2011	2:31:52 PM	PHl3 MFC set to  0.000000
5/31/2011	2:31:52 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:31:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:31:52 PM	Tube furnace set to 0
5/31/2011	2:32:52 PM	Helium valve closed
5/31/2011	2:32:52 PM	H2 valve closed
5/31/2011	2:32:52 PM	BCl3 valve closed
5/31/2011	2:32:52 PM	PH3 valve closed
5/31/2011	2:32:52 PM	SiCl4 pre valve closed
5/31/2011	2:32:52 PM	SiCl4 post valve closed
5/31/2011	2:32:52 PM	Bubbler valve closed
5/31/2011	2:32:52 PM	Main Vac valve opened
5/31/2011	2:32:52 PM	Bypass valve opened
5/31/2011	2:32:52 PM	Helium MFC set to  0.000000
5/31/2011	2:32:52 PM	H2 MFC set to  0.000000
5/31/2011	2:32:52 PM	BCl3 MFC set to  0.000000
5/31/2011	2:32:52 PM	PHl3 MFC set to  0.000000
5/31/2011	2:32:52 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:32:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:32:52 PM	Tube furnace set to 0
5/31/2011	2:33:52 PM	H2 valve closed
5/31/2011	2:33:52 PM	BCl3 valve closed
5/31/2011	2:33:52 PM	PH3 valve closed
5/31/2011	2:33:52 PM	SiCl4 pre valve closed
5/31/2011	2:33:52 PM	SiCl4 post valve closed
5/31/2011	2:33:52 PM	Bubbler valve closed
5/31/2011	2:33:52 PM	Helium valve opened
5/31/2011	2:33:52 PM	Main Vac valve opened
5/31/2011	2:33:52 PM	Bypass valve opened
5/31/2011	2:33:52 PM	Helium MFC set to  100.000000
5/31/2011	2:33:52 PM	H2 MFC set to  0.000000
5/31/2011	2:33:52 PM	BCl3 MFC set to  0.000000
5/31/2011	2:33:52 PM	PHl3 MFC set to  0.000000
5/31/2011	2:33:52 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:33:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:33:52 PM	Tube furnace set to 0
5/31/2011	2:34:52 PM	Helium valve closed
5/31/2011	2:34:52 PM	H2 valve closed
5/31/2011	2:34:52 PM	BCl3 valve closed
5/31/2011	2:34:52 PM	PH3 valve closed
5/31/2011	2:34:52 PM	SiCl4 pre valve closed
5/31/2011	2:34:52 PM	SiCl4 post valve closed
5/31/2011	2:34:52 PM	Bubbler valve closed
5/31/2011	2:34:52 PM	Main Vac valve opened
5/31/2011	2:34:52 PM	Bypass valve opened
5/31/2011	2:34:52 PM	Helium MFC set to  0.000000
5/31/2011	2:34:52 PM	H2 MFC set to  0.000000
5/31/2011	2:34:52 PM	BCl3 MFC set to  0.000000
5/31/2011	2:34:52 PM	PHl3 MFC set to  0.000000
5/31/2011	2:34:52 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:34:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:34:53 PM	Tube furnace set to 0
5/31/2011	2:35:53 PM	H2 valve closed
5/31/2011	2:35:53 PM	BCl3 valve closed
5/31/2011	2:35:53 PM	PH3 valve closed
5/31/2011	2:35:53 PM	SiCl4 pre valve closed
5/31/2011	2:35:53 PM	SiCl4 post valve closed
5/31/2011	2:35:53 PM	Bubbler valve closed
5/31/2011	2:35:53 PM	Helium valve opened
5/31/2011	2:35:53 PM	Main Vac valve opened
5/31/2011	2:35:53 PM	Bypass valve opened
5/31/2011	2:35:53 PM	Helium MFC set to  100.000000
5/31/2011	2:35:53 PM	H2 MFC set to  0.000000
5/31/2011	2:35:53 PM	BCl3 MFC set to  0.000000
5/31/2011	2:35:53 PM	PHl3 MFC set to  0.000000
5/31/2011	2:35:53 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:35:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:35:53 PM	Tube furnace set to 0
5/31/2011	2:36:53 PM	Helium valve closed
5/31/2011	2:36:53 PM	H2 valve closed
5/31/2011	2:36:53 PM	BCl3 valve closed
5/31/2011	2:36:53 PM	PH3 valve closed
5/31/2011	2:36:53 PM	SiCl4 pre valve closed
5/31/2011	2:36:53 PM	SiCl4 post valve closed
5/31/2011	2:36:53 PM	Bubbler valve closed
5/31/2011	2:36:53 PM	Main Vac valve opened
5/31/2011	2:36:53 PM	Bypass valve opened
5/31/2011	2:36:53 PM	Helium MFC set to  0.000000
5/31/2011	2:36:53 PM	H2 MFC set to  0.000000
5/31/2011	2:36:53 PM	BCl3 MFC set to  0.000000
5/31/2011	2:36:53 PM	PHl3 MFC set to  0.000000
5/31/2011	2:36:53 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:36:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:36:53 PM	Tube furnace set to 0
5/31/2011	2:37:53 PM	H2 valve closed
5/31/2011	2:37:53 PM	BCl3 valve closed
5/31/2011	2:37:53 PM	PH3 valve closed
5/31/2011	2:37:53 PM	SiCl4 pre valve closed
5/31/2011	2:37:53 PM	SiCl4 post valve closed
5/31/2011	2:37:53 PM	Bubbler valve closed
5/31/2011	2:37:53 PM	Helium valve opened
5/31/2011	2:37:53 PM	Main Vac valve opened
5/31/2011	2:37:53 PM	Bypass valve opened
5/31/2011	2:37:53 PM	Helium MFC set to  100.000000
5/31/2011	2:37:53 PM	H2 MFC set to  0.000000
5/31/2011	2:37:53 PM	BCl3 MFC set to  0.000000
5/31/2011	2:37:53 PM	PHl3 MFC set to  0.000000
5/31/2011	2:37:53 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:37:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:37:53 PM	Tube furnace set to 0
5/31/2011	2:38:53 PM	Helium valve closed
5/31/2011	2:38:53 PM	H2 valve closed
5/31/2011	2:38:53 PM	BCl3 valve closed
5/31/2011	2:38:53 PM	PH3 valve closed
5/31/2011	2:38:53 PM	SiCl4 pre valve closed
5/31/2011	2:38:53 PM	SiCl4 post valve closed
5/31/2011	2:38:53 PM	Bubbler valve closed
5/31/2011	2:38:53 PM	Main Vac valve opened
5/31/2011	2:38:53 PM	Bypass valve opened
5/31/2011	2:38:53 PM	Helium MFC set to  0.000000
5/31/2011	2:38:53 PM	H2 MFC set to  0.000000
5/31/2011	2:38:53 PM	BCl3 MFC set to  0.000000
5/31/2011	2:38:53 PM	PHl3 MFC set to  0.000000
5/31/2011	2:38:53 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:38:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:38:53 PM	Tube furnace set to 0
5/31/2011	2:39:53 PM	H2 valve closed
5/31/2011	2:39:53 PM	BCl3 valve closed
5/31/2011	2:39:53 PM	PH3 valve closed
5/31/2011	2:39:53 PM	SiCl4 pre valve closed
5/31/2011	2:39:53 PM	SiCl4 post valve closed
5/31/2011	2:39:53 PM	Bubbler valve closed
5/31/2011	2:39:53 PM	Helium valve opened
5/31/2011	2:39:53 PM	Main Vac valve opened
5/31/2011	2:39:53 PM	Bypass valve opened
5/31/2011	2:39:53 PM	Helium MFC set to  100.000000
5/31/2011	2:39:53 PM	H2 MFC set to  0.000000
5/31/2011	2:39:53 PM	BCl3 MFC set to  0.000000
5/31/2011	2:39:53 PM	PHl3 MFC set to  0.000000
5/31/2011	2:39:53 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:39:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:39:54 PM	Tube furnace set to 0
5/31/2011	2:40:27 PM	Helium valve closed
5/31/2011	2:40:27 PM	H2 valve closed
5/31/2011	2:40:27 PM	BCl3 valve closed
5/31/2011	2:40:27 PM	PH3 valve closed
5/31/2011	2:40:27 PM	SiCl4 pre valve closed
5/31/2011	2:40:27 PM	SiCl4 post valve closed
5/31/2011	2:40:27 PM	Bubbler valve closed
5/31/2011	2:40:27 PM	Main Vac valve opened
5/31/2011	2:40:27 PM	Bypass valve opened
5/31/2011	2:40:27 PM	Helium MFC set to  0.000000
5/31/2011	2:40:27 PM	H2 MFC set to  0.000000
5/31/2011	2:40:27 PM	BCl3 MFC set to  0.000000
5/31/2011	2:40:27 PM	PHl3 MFC set to  0.000000
5/31/2011	2:40:27 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:40:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:40:27 PM	Tube furnace set to 0
5/31/2011	2:41:27 PM	H2 valve closed
5/31/2011	2:41:28 PM	BCl3 valve closed
5/31/2011	2:41:28 PM	PH3 valve closed
5/31/2011	2:41:28 PM	SiCl4 pre valve closed
5/31/2011	2:41:28 PM	SiCl4 post valve closed
5/31/2011	2:41:28 PM	Bubbler valve closed
5/31/2011	2:41:28 PM	Helium valve opened
5/31/2011	2:41:28 PM	Main Vac valve opened
5/31/2011	2:41:28 PM	Bypass valve opened
5/31/2011	2:41:28 PM	Helium MFC set to  100.000000
5/31/2011	2:41:28 PM	H2 MFC set to  0.000000
5/31/2011	2:41:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:41:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:41:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:41:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:41:28 PM	Tube furnace set to 0
5/31/2011	2:42:28 PM	Helium valve closed
5/31/2011	2:42:28 PM	H2 valve closed
5/31/2011	2:42:28 PM	BCl3 valve closed
5/31/2011	2:42:28 PM	PH3 valve closed
5/31/2011	2:42:28 PM	SiCl4 pre valve closed
5/31/2011	2:42:28 PM	SiCl4 post valve closed
5/31/2011	2:42:28 PM	Bubbler valve closed
5/31/2011	2:42:28 PM	Main Vac valve opened
5/31/2011	2:42:28 PM	Bypass valve opened
5/31/2011	2:42:28 PM	Helium MFC set to  0.000000
5/31/2011	2:42:28 PM	H2 MFC set to  0.000000
5/31/2011	2:42:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:42:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:42:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:42:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:42:28 PM	Tube furnace set to 0
5/31/2011	2:43:28 PM	H2 valve closed
5/31/2011	2:43:28 PM	BCl3 valve closed
5/31/2011	2:43:28 PM	PH3 valve closed
5/31/2011	2:43:28 PM	SiCl4 pre valve closed
5/31/2011	2:43:28 PM	SiCl4 post valve closed
5/31/2011	2:43:28 PM	Bubbler valve closed
5/31/2011	2:43:28 PM	Helium valve opened
5/31/2011	2:43:28 PM	Main Vac valve opened
5/31/2011	2:43:28 PM	Bypass valve opened
5/31/2011	2:43:28 PM	Helium MFC set to  100.000000
5/31/2011	2:43:28 PM	H2 MFC set to  0.000000
5/31/2011	2:43:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:43:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:43:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:43:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:43:28 PM	Tube furnace set to 0
5/31/2011	2:44:28 PM	Helium valve closed
5/31/2011	2:44:28 PM	H2 valve closed
5/31/2011	2:44:28 PM	BCl3 valve closed
5/31/2011	2:44:28 PM	PH3 valve closed
5/31/2011	2:44:28 PM	SiCl4 pre valve closed
5/31/2011	2:44:28 PM	SiCl4 post valve closed
5/31/2011	2:44:28 PM	Bubbler valve closed
5/31/2011	2:44:28 PM	Main Vac valve opened
5/31/2011	2:44:28 PM	Bypass valve opened
5/31/2011	2:44:28 PM	Helium MFC set to  0.000000
5/31/2011	2:44:28 PM	H2 MFC set to  0.000000
5/31/2011	2:44:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:44:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:44:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:44:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:44:28 PM	Tube furnace set to 0
5/31/2011	2:45:28 PM	H2 valve closed
5/31/2011	2:45:28 PM	BCl3 valve closed
5/31/2011	2:45:28 PM	PH3 valve closed
5/31/2011	2:45:28 PM	SiCl4 pre valve closed
5/31/2011	2:45:28 PM	SiCl4 post valve closed
5/31/2011	2:45:28 PM	Bubbler valve closed
5/31/2011	2:45:28 PM	Helium valve opened
5/31/2011	2:45:28 PM	Main Vac valve opened
5/31/2011	2:45:28 PM	Bypass valve opened
5/31/2011	2:45:28 PM	Helium MFC set to  100.000000
5/31/2011	2:45:28 PM	H2 MFC set to  0.000000
5/31/2011	2:45:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:45:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:45:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:45:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:45:29 PM	Tube furnace set to 0
5/31/2011	2:46:29 PM	Helium valve closed
5/31/2011	2:46:29 PM	H2 valve closed
5/31/2011	2:46:29 PM	BCl3 valve closed
5/31/2011	2:46:29 PM	PH3 valve closed
5/31/2011	2:46:29 PM	SiCl4 pre valve closed
5/31/2011	2:46:29 PM	SiCl4 post valve closed
5/31/2011	2:46:29 PM	Bubbler valve closed
5/31/2011	2:46:29 PM	Main Vac valve opened
5/31/2011	2:46:29 PM	Bypass valve opened
5/31/2011	2:46:29 PM	Helium MFC set to  0.000000
5/31/2011	2:46:29 PM	H2 MFC set to  0.000000
5/31/2011	2:46:29 PM	BCl3 MFC set to  0.000000
5/31/2011	2:46:29 PM	PHl3 MFC set to  0.000000
5/31/2011	2:46:29 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:46:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:46:29 PM	Tube furnace set to 0
5/31/2011	2:47:29 PM	H2 valve closed
5/31/2011	2:47:29 PM	BCl3 valve closed
5/31/2011	2:47:29 PM	PH3 valve closed
5/31/2011	2:47:29 PM	SiCl4 pre valve closed
5/31/2011	2:47:29 PM	SiCl4 post valve closed
5/31/2011	2:47:29 PM	Bubbler valve closed
5/31/2011	2:47:29 PM	Helium valve opened
5/31/2011	2:47:29 PM	Main Vac valve opened
5/31/2011	2:47:29 PM	Bypass valve opened
5/31/2011	2:47:29 PM	Helium MFC set to  100.000000
5/31/2011	2:47:29 PM	H2 MFC set to  0.000000
5/31/2011	2:47:29 PM	BCl3 MFC set to  0.000000
5/31/2011	2:47:29 PM	PHl3 MFC set to  0.000000
5/31/2011	2:47:29 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:47:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:47:29 PM	Tube furnace set to 0
5/31/2011	2:48:27 PM	Helium valve closed
5/31/2011	2:48:27 PM	H2 valve closed
5/31/2011	2:48:27 PM	BCl3 valve closed
5/31/2011	2:48:27 PM	PH3 valve closed
5/31/2011	2:48:27 PM	SiCl4 pre valve closed
5/31/2011	2:48:27 PM	SiCl4 post valve closed
5/31/2011	2:48:27 PM	Bubbler valve closed
5/31/2011	2:48:27 PM	Main Vac valve opened
5/31/2011	2:48:27 PM	Bypass valve opened
5/31/2011	2:48:27 PM	Helium MFC set to  0.000000
5/31/2011	2:48:27 PM	H2 MFC set to  0.000000
5/31/2011	2:48:27 PM	BCl3 MFC set to  0.000000
5/31/2011	2:48:27 PM	PHl3 MFC set to  0.000000
5/31/2011	2:48:27 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:48:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:48:28 PM	Tube furnace set to 0
5/31/2011	2:49:28 PM	H2 valve closed
5/31/2011	2:49:28 PM	BCl3 valve closed
5/31/2011	2:49:28 PM	PH3 valve closed
5/31/2011	2:49:28 PM	SiCl4 pre valve closed
5/31/2011	2:49:28 PM	SiCl4 post valve closed
5/31/2011	2:49:28 PM	Bubbler valve closed
5/31/2011	2:49:28 PM	Helium valve opened
5/31/2011	2:49:28 PM	Main Vac valve opened
5/31/2011	2:49:28 PM	Bypass valve opened
5/31/2011	2:49:28 PM	Helium MFC set to  100.000000
5/31/2011	2:49:28 PM	H2 MFC set to  0.000000
5/31/2011	2:49:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:49:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:49:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:49:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:49:28 PM	Tube furnace set to 0
5/31/2011	2:50:28 PM	Helium valve closed
5/31/2011	2:50:28 PM	H2 valve closed
5/31/2011	2:50:28 PM	BCl3 valve closed
5/31/2011	2:50:28 PM	PH3 valve closed
5/31/2011	2:50:28 PM	SiCl4 pre valve closed
5/31/2011	2:50:28 PM	SiCl4 post valve closed
5/31/2011	2:50:28 PM	Bubbler valve closed
5/31/2011	2:50:28 PM	Main Vac valve opened
5/31/2011	2:50:28 PM	Bypass valve opened
5/31/2011	2:50:28 PM	Helium MFC set to  0.000000
5/31/2011	2:50:28 PM	H2 MFC set to  0.000000
5/31/2011	2:50:28 PM	BCl3 MFC set to  0.000000
5/31/2011	2:50:28 PM	PHl3 MFC set to  0.000000
5/31/2011	2:50:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	2:50:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	2:50:28 PM	Tube furnace set to 0
5/31/2011	2:50:29 PM	Run finished at 2:50 PM
5/31/2011	2:50:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	2:57:32 PM	Helium MFC set to  50.000000
5/31/2011	2:57:36 PM	Helium valve opened
5/31/2011	3:08:06 PM	Helium valve closed
5/31/2011	3:08:08 PM	Helium MFC set to  0.000000
5/31/2011	3:08:49 PM	Main Vac valve closed
5/31/2011	3:08:51 PM	Bypass valve closed
5/31/2011	3:09:06 PM	Bypass valve opened
5/31/2011	3:09:06 PM	Main Vac valve opened
5/31/2011	3:09:26 PM	Tube furnace set to 20
5/31/2011	3:09:28 PM	Tube furnace set to 200
5/31/2011	3:10:30 PM	Recipe started at 3:10 PM
5/31/2011	3:10:30 PM	Helium valve closed
5/31/2011	3:10:30 PM	BCl3 valve closed
5/31/2011	3:10:30 PM	PH3 valve closed
5/31/2011	3:10:30 PM	SiCl4 pre valve closed
5/31/2011	3:10:30 PM	SiCl4 post valve closed
5/31/2011	3:10:30 PM	Main Vac valve closed
5/31/2011	3:10:30 PM	Bypass valve closed
5/31/2011	3:10:30 PM	Bubbler valve closed
5/31/2011	3:10:30 PM	H2 valve opened
5/31/2011	3:10:30 PM	Helium MFC set to  0.000000
5/31/2011	3:10:30 PM	H2 MFC set to  500.000000
5/31/2011	3:10:30 PM	BCl3 MFC set to  0.000000
5/31/2011	3:10:30 PM	PHl3 MFC set to  0.000000
5/31/2011	3:10:30 PM	SiCl4 MFC set to  0.000000
5/31/2011	3:10:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	3:10:30 PM	Tube furnace set to 200
5/31/2011	3:11:48 PM	Helium valve closed
5/31/2011	3:11:48 PM	BCl3 valve closed
5/31/2011	3:11:48 PM	PH3 valve closed
5/31/2011	3:11:48 PM	SiCl4 pre valve closed
5/31/2011	3:11:48 PM	SiCl4 post valve closed
5/31/2011	3:11:48 PM	Main Vac valve closed
5/31/2011	3:11:48 PM	Bypass valve closed
5/31/2011	3:11:48 PM	H2 valve opened
5/31/2011	3:11:48 PM	Bubbler valve opened
5/31/2011	3:11:48 PM	Helium MFC set to  0.000000
5/31/2011	3:11:48 PM	H2 MFC set to  400.000000
5/31/2011	3:11:48 PM	BCl3 MFC set to  0.000000
5/31/2011	3:11:48 PM	PHl3 MFC set to  0.000000
5/31/2011	3:11:48 PM	SiCl4 MFC set to  0.000000
5/31/2011	3:11:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	3:11:48 PM	Tube furnace set to 1000
5/31/2011	3:33:48 PM	Helium valve closed
5/31/2011	3:33:48 PM	PH3 valve closed
5/31/2011	3:33:48 PM	Main Vac valve closed
5/31/2011	3:33:48 PM	Bypass valve closed
5/31/2011	3:33:48 PM	H2 valve opened
5/31/2011	3:33:48 PM	BCl3 valve opened
5/31/2011	3:33:48 PM	SiCl4 pre valve opened
5/31/2011	3:33:48 PM	SiCl4 post valve opened
5/31/2011	3:33:48 PM	Bubbler valve opened
5/31/2011	3:33:48 PM	Helium MFC set to  0.000000
5/31/2011	3:33:48 PM	H2 MFC set to  400.000000
5/31/2011	3:33:48 PM	BCl3 MFC set to  2.400000
5/31/2011	3:33:48 PM	PHl3 MFC set to  0.000000
5/31/2011	3:33:48 PM	SiCl4 MFC set to  40.000000
5/31/2011	3:33:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	3:33:49 PM	Tube furnace set to 1000
5/31/2011	3:39:49 PM	H2 valve closed
5/31/2011	3:39:49 PM	BCl3 valve closed
5/31/2011	3:39:49 PM	PH3 valve closed
5/31/2011	3:39:49 PM	SiCl4 pre valve closed
5/31/2011	3:39:49 PM	SiCl4 post valve closed
5/31/2011	3:39:49 PM	Main Vac valve closed
5/31/2011	3:39:49 PM	Bypass valve closed
5/31/2011	3:39:49 PM	Helium valve opened
5/31/2011	3:39:49 PM	Bubbler valve opened
5/31/2011	3:39:49 PM	Helium MFC set to  400.000000
5/31/2011	3:39:49 PM	H2 MFC set to  0.000000
5/31/2011	3:39:49 PM	BCl3 MFC set to  0.000000
5/31/2011	3:39:49 PM	PHl3 MFC set to  0.000000
5/31/2011	3:39:49 PM	SiCl4 MFC set to  0.000000
5/31/2011	3:39:49 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	3:39:49 PM	Tube furnace set to 0
5/31/2011	3:59:49 PM	Helium valve closed
5/31/2011	3:59:49 PM	H2 valve closed
5/31/2011	3:59:49 PM	BCl3 valve closed
5/31/2011	3:59:49 PM	PH3 valve closed
5/31/2011	3:59:49 PM	SiCl4 pre valve closed
5/31/2011	3:59:49 PM	SiCl4 post valve closed
5/31/2011	3:59:49 PM	Main Vac valve closed
5/31/2011	3:59:49 PM	Bypass valve closed
5/31/2011	3:59:49 PM	Bubbler valve closed
5/31/2011	3:59:49 PM	Helium MFC set to  0.000000
5/31/2011	3:59:49 PM	H2 MFC set to  0.000000
5/31/2011	3:59:49 PM	BCl3 MFC set to  0.000000
5/31/2011	3:59:49 PM	PHl3 MFC set to  0.000000
5/31/2011	3:59:49 PM	SiCl4 MFC set to  0.000000
5/31/2011	3:59:49 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	3:59:49 PM	Tube furnace set to 0
5/31/2011	3:59:49 PM	Run finished at 3:59 PM
5/31/2011	4:03:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	4:03:02 PM	Recipe started at 4:03 PM
5/31/2011	4:03:02 PM	Helium valve closed
5/31/2011	4:03:02 PM	H2 valve closed
5/31/2011	4:03:02 PM	BCl3 valve closed
5/31/2011	4:03:02 PM	PH3 valve closed
5/31/2011	4:03:02 PM	SiCl4 pre valve closed
5/31/2011	4:03:02 PM	SiCl4 post valve closed
5/31/2011	4:03:02 PM	Main Vac valve closed
5/31/2011	4:03:02 PM	Bubbler valve closed
5/31/2011	4:03:02 PM	Bypass valve opened
5/31/2011	4:03:02 PM	Helium MFC set to  0.000000
5/31/2011	4:03:02 PM	H2 MFC set to  0.000000
5/31/2011	4:03:02 PM	BCl3 MFC set to  0.000000
5/31/2011	4:03:02 PM	PHl3 MFC set to  0.000000
5/31/2011	4:03:02 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:03:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:03:02 PM	Tube furnace set to 0
5/31/2011	4:03:26 PM	Helium valve closed
5/31/2011	4:03:26 PM	H2 valve closed
5/31/2011	4:03:26 PM	BCl3 valve closed
5/31/2011	4:03:26 PM	PH3 valve closed
5/31/2011	4:03:26 PM	SiCl4 pre valve closed
5/31/2011	4:03:26 PM	SiCl4 post valve closed
5/31/2011	4:03:26 PM	Bubbler valve closed
5/31/2011	4:03:26 PM	Main Vac valve opened
5/31/2011	4:03:26 PM	Bypass valve opened
5/31/2011	4:03:26 PM	Helium MFC set to  0.000000
5/31/2011	4:03:26 PM	H2 MFC set to  0.000000
5/31/2011	4:03:26 PM	BCl3 MFC set to  0.000000
5/31/2011	4:03:26 PM	PHl3 MFC set to  0.000000
5/31/2011	4:03:26 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:03:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:03:26 PM	Tube furnace set to 0
5/31/2011	4:03:26 PM	Run finished at 4:03 PM
5/31/2011	4:03:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	4:03:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	4:03:28 PM	Recipe started at 4:03 PM
5/31/2011	4:03:28 PM	H2 valve closed
5/31/2011	4:03:28 PM	BCl3 valve closed
5/31/2011	4:03:28 PM	PH3 valve closed
5/31/2011	4:03:28 PM	SiCl4 pre valve closed
5/31/2011	4:03:28 PM	SiCl4 post valve closed
5/31/2011	4:03:28 PM	Main Vac valve closed
5/31/2011	4:03:28 PM	Bypass valve closed
5/31/2011	4:03:28 PM	Bubbler valve closed
5/31/2011	4:03:28 PM	Helium valve opened
5/31/2011	4:03:28 PM	Helium MFC set to  500.000000
5/31/2011	4:03:28 PM	H2 MFC set to  0.000000
5/31/2011	4:03:28 PM	BCl3 MFC set to  0.000000
5/31/2011	4:03:28 PM	PHl3 MFC set to  0.000000
5/31/2011	4:03:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:03:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:03:29 PM	Tube furnace set to 0
5/31/2011	4:04:42 PM	Helium valve closed
5/31/2011	4:04:42 PM	H2 valve closed
5/31/2011	4:04:42 PM	BCl3 valve closed
5/31/2011	4:04:42 PM	PH3 valve closed
5/31/2011	4:04:42 PM	SiCl4 pre valve closed
5/31/2011	4:04:42 PM	SiCl4 post valve closed
5/31/2011	4:04:42 PM	Main Vac valve closed
5/31/2011	4:04:42 PM	Bypass valve closed
5/31/2011	4:04:42 PM	Bubbler valve closed
5/31/2011	4:04:42 PM	Helium MFC set to  0.000000
5/31/2011	4:04:42 PM	H2 MFC set to  0.000000
5/31/2011	4:04:42 PM	BCl3 MFC set to  0.000000
5/31/2011	4:04:42 PM	PHl3 MFC set to  0.000000
5/31/2011	4:04:42 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:04:42 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:04:42 PM	Tube furnace set to 0
5/31/2011	4:04:42 PM	Run finished at 4:04 PM
5/31/2011	4:04:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	4:07:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	4:07:26 PM	Recipe started at 4:07 PM
5/31/2011	4:07:26 PM	H2 valve closed
5/31/2011	4:07:26 PM	BCl3 valve closed
5/31/2011	4:07:26 PM	PH3 valve closed
5/31/2011	4:07:26 PM	SiCl4 pre valve closed
5/31/2011	4:07:26 PM	SiCl4 post valve closed
5/31/2011	4:07:26 PM	Main Vac valve closed
5/31/2011	4:07:26 PM	Bypass valve closed
5/31/2011	4:07:26 PM	Bubbler valve closed
5/31/2011	4:07:26 PM	Helium valve opened
5/31/2011	4:07:26 PM	Helium MFC set to  500.000000
5/31/2011	4:07:26 PM	H2 MFC set to  0.000000
5/31/2011	4:07:26 PM	BCl3 MFC set to  0.000000
5/31/2011	4:07:26 PM	PHl3 MFC set to  0.000000
5/31/2011	4:07:26 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:07:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:07:26 PM	Tube furnace set to 0
5/31/2011	4:07:28 PM	Helium valve closed
5/31/2011	4:07:28 PM	H2 valve closed
5/31/2011	4:07:28 PM	BCl3 valve closed
5/31/2011	4:07:28 PM	PH3 valve closed
5/31/2011	4:07:28 PM	SiCl4 pre valve closed
5/31/2011	4:07:28 PM	SiCl4 post valve closed
5/31/2011	4:07:28 PM	Main Vac valve closed
5/31/2011	4:07:28 PM	Bypass valve closed
5/31/2011	4:07:28 PM	Bubbler valve closed
5/31/2011	4:07:28 PM	Helium MFC set to  0.000000
5/31/2011	4:07:28 PM	H2 MFC set to  0.000000
5/31/2011	4:07:28 PM	BCl3 MFC set to  0.000000
5/31/2011	4:07:28 PM	PHl3 MFC set to  0.000000
5/31/2011	4:07:28 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:07:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:07:28 PM	Tube furnace set to 0
5/31/2011	4:07:28 PM	Run finished at 4:07 PM
5/31/2011	4:07:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	4:09:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	4:09:25 PM	Recipe started at 4:09 PM
5/31/2011	4:09:25 PM	Helium valve closed
5/31/2011	4:09:25 PM	H2 valve closed
5/31/2011	4:09:25 PM	BCl3 valve closed
5/31/2011	4:09:25 PM	PH3 valve closed
5/31/2011	4:09:25 PM	SiCl4 pre valve closed
5/31/2011	4:09:25 PM	SiCl4 post valve closed
5/31/2011	4:09:25 PM	Main Vac valve closed
5/31/2011	4:09:25 PM	Bubbler valve closed
5/31/2011	4:09:25 PM	Bypass valve opened
5/31/2011	4:09:25 PM	Helium MFC set to  0.000000
5/31/2011	4:09:25 PM	H2 MFC set to  0.000000
5/31/2011	4:09:25 PM	BCl3 MFC set to  0.000000
5/31/2011	4:09:25 PM	PHl3 MFC set to  0.000000
5/31/2011	4:09:25 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:09:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:09:25 PM	Tube furnace set to 0
5/31/2011	4:09:54 PM	Helium valve closed
5/31/2011	4:09:54 PM	H2 valve closed
5/31/2011	4:09:54 PM	BCl3 valve closed
5/31/2011	4:09:54 PM	PH3 valve closed
5/31/2011	4:09:54 PM	SiCl4 pre valve closed
5/31/2011	4:09:54 PM	SiCl4 post valve closed
5/31/2011	4:09:54 PM	Bubbler valve closed
5/31/2011	4:09:54 PM	Main Vac valve opened
5/31/2011	4:09:54 PM	Bypass valve opened
5/31/2011	4:09:54 PM	Helium MFC set to  0.000000
5/31/2011	4:09:54 PM	H2 MFC set to  0.000000
5/31/2011	4:09:54 PM	BCl3 MFC set to  0.000000
5/31/2011	4:09:54 PM	PHl3 MFC set to  0.000000
5/31/2011	4:09:54 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:09:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:09:54 PM	Tube furnace set to 0
5/31/2011	4:09:54 PM	Run finished at 4:09 PM
5/31/2011	4:09:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	4:21:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	4:21:20 PM	Recipe started at 4:21 PM
5/31/2011	4:21:20 PM	H2 valve closed
5/31/2011	4:21:20 PM	BCl3 valve closed
5/31/2011	4:21:20 PM	PH3 valve closed
5/31/2011	4:21:20 PM	SiCl4 pre valve closed
5/31/2011	4:21:20 PM	SiCl4 post valve closed
5/31/2011	4:21:20 PM	Main Vac valve closed
5/31/2011	4:21:20 PM	Bypass valve closed
5/31/2011	4:21:20 PM	Bubbler valve closed
5/31/2011	4:21:20 PM	Helium valve opened
5/31/2011	4:21:20 PM	Helium MFC set to  500.000000
5/31/2011	4:21:20 PM	H2 MFC set to  0.000000
5/31/2011	4:21:20 PM	BCl3 MFC set to  0.000000
5/31/2011	4:21:20 PM	PHl3 MFC set to  0.000000
5/31/2011	4:21:20 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:21:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:21:21 PM	Tube furnace set to 0
5/31/2011	4:22:33 PM	Helium valve closed
5/31/2011	4:22:33 PM	H2 valve closed
5/31/2011	4:22:33 PM	BCl3 valve closed
5/31/2011	4:22:33 PM	PH3 valve closed
5/31/2011	4:22:33 PM	SiCl4 pre valve closed
5/31/2011	4:22:33 PM	SiCl4 post valve closed
5/31/2011	4:22:33 PM	Main Vac valve closed
5/31/2011	4:22:33 PM	Bypass valve closed
5/31/2011	4:22:33 PM	Bubbler valve closed
5/31/2011	4:22:33 PM	Helium MFC set to  0.000000
5/31/2011	4:22:33 PM	H2 MFC set to  0.000000
5/31/2011	4:22:33 PM	BCl3 MFC set to  0.000000
5/31/2011	4:22:33 PM	PHl3 MFC set to  0.000000
5/31/2011	4:22:33 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:22:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:22:33 PM	Tube furnace set to 0
5/31/2011	4:22:34 PM	Run finished at 4:22 PM
5/31/2011	4:22:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	4:26:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	4:26:18 PM	Recipe started at 4:26 PM
5/31/2011	4:26:18 PM	Helium valve closed
5/31/2011	4:26:18 PM	H2 valve closed
5/31/2011	4:26:18 PM	BCl3 valve closed
5/31/2011	4:26:18 PM	PH3 valve closed
5/31/2011	4:26:18 PM	SiCl4 pre valve closed
5/31/2011	4:26:18 PM	SiCl4 post valve closed
5/31/2011	4:26:18 PM	Main Vac valve closed
5/31/2011	4:26:18 PM	Bubbler valve closed
5/31/2011	4:26:18 PM	Bypass valve opened
5/31/2011	4:26:18 PM	Helium MFC set to  0.000000
5/31/2011	4:26:18 PM	H2 MFC set to  0.000000
5/31/2011	4:26:18 PM	BCl3 MFC set to  0.000000
5/31/2011	4:26:18 PM	PHl3 MFC set to  0.000000
5/31/2011	4:26:18 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:26:18 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:26:18 PM	Tube furnace set to 0
5/31/2011	4:26:49 PM	Helium valve closed
5/31/2011	4:26:49 PM	H2 valve closed
5/31/2011	4:26:49 PM	BCl3 valve closed
5/31/2011	4:26:49 PM	PH3 valve closed
5/31/2011	4:26:49 PM	SiCl4 pre valve closed
5/31/2011	4:26:50 PM	SiCl4 post valve closed
5/31/2011	4:26:50 PM	Bubbler valve closed
5/31/2011	4:26:50 PM	Main Vac valve opened
5/31/2011	4:26:50 PM	Bypass valve opened
5/31/2011	4:26:50 PM	Helium MFC set to  0.000000
5/31/2011	4:26:50 PM	H2 MFC set to  0.000000
5/31/2011	4:26:50 PM	BCl3 MFC set to  0.000000
5/31/2011	4:26:50 PM	PHl3 MFC set to  0.000000
5/31/2011	4:26:50 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:26:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:26:50 PM	Tube furnace set to 0
5/31/2011	4:27:50 PM	H2 valve closed
5/31/2011	4:27:50 PM	BCl3 valve closed
5/31/2011	4:27:50 PM	PH3 valve closed
5/31/2011	4:27:50 PM	SiCl4 pre valve closed
5/31/2011	4:27:50 PM	SiCl4 post valve closed
5/31/2011	4:27:50 PM	Bubbler valve closed
5/31/2011	4:27:50 PM	Helium valve opened
5/31/2011	4:27:50 PM	Main Vac valve opened
5/31/2011	4:27:50 PM	Bypass valve opened
5/31/2011	4:27:50 PM	Helium MFC set to  100.000000
5/31/2011	4:27:50 PM	H2 MFC set to  0.000000
5/31/2011	4:27:50 PM	BCl3 MFC set to  0.000000
5/31/2011	4:27:50 PM	PHl3 MFC set to  0.000000
5/31/2011	4:27:50 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:27:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:27:50 PM	Tube furnace set to 0
5/31/2011	4:28:50 PM	Helium valve closed
5/31/2011	4:28:50 PM	H2 valve closed
5/31/2011	4:28:50 PM	BCl3 valve closed
5/31/2011	4:28:50 PM	PH3 valve closed
5/31/2011	4:28:50 PM	SiCl4 pre valve closed
5/31/2011	4:28:50 PM	SiCl4 post valve closed
5/31/2011	4:28:50 PM	Bubbler valve closed
5/31/2011	4:28:50 PM	Main Vac valve opened
5/31/2011	4:28:50 PM	Bypass valve opened
5/31/2011	4:28:50 PM	Helium MFC set to  0.000000
5/31/2011	4:28:50 PM	H2 MFC set to  0.000000
5/31/2011	4:28:50 PM	BCl3 MFC set to  0.000000
5/31/2011	4:28:50 PM	PHl3 MFC set to  0.000000
5/31/2011	4:28:50 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:28:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:28:50 PM	Tube furnace set to 0
5/31/2011	4:29:12 PM	H2 valve closed
5/31/2011	4:29:12 PM	BCl3 valve closed
5/31/2011	4:29:12 PM	PH3 valve closed
5/31/2011	4:29:12 PM	SiCl4 pre valve closed
5/31/2011	4:29:12 PM	SiCl4 post valve closed
5/31/2011	4:29:12 PM	Bubbler valve closed
5/31/2011	4:29:12 PM	Helium valve opened
5/31/2011	4:29:12 PM	Main Vac valve opened
5/31/2011	4:29:12 PM	Bypass valve opened
5/31/2011	4:29:12 PM	Helium MFC set to  100.000000
5/31/2011	4:29:12 PM	H2 MFC set to  0.000000
5/31/2011	4:29:12 PM	BCl3 MFC set to  0.000000
5/31/2011	4:29:12 PM	PHl3 MFC set to  0.000000
5/31/2011	4:29:12 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:29:12 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:29:12 PM	Tube furnace set to 0
5/31/2011	4:29:13 PM	Helium valve closed
5/31/2011	4:29:13 PM	H2 valve closed
5/31/2011	4:29:13 PM	BCl3 valve closed
5/31/2011	4:29:13 PM	PH3 valve closed
5/31/2011	4:29:13 PM	SiCl4 pre valve closed
5/31/2011	4:29:13 PM	SiCl4 post valve closed
5/31/2011	4:29:13 PM	Bubbler valve closed
5/31/2011	4:29:13 PM	Main Vac valve opened
5/31/2011	4:29:13 PM	Bypass valve opened
5/31/2011	4:29:13 PM	Helium MFC set to  0.000000
5/31/2011	4:29:13 PM	H2 MFC set to  0.000000
5/31/2011	4:29:13 PM	BCl3 MFC set to  0.000000
5/31/2011	4:29:13 PM	PHl3 MFC set to  0.000000
5/31/2011	4:29:13 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:29:13 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:29:13 PM	Tube furnace set to 0
5/31/2011	4:30:13 PM	H2 valve closed
5/31/2011	4:30:13 PM	BCl3 valve closed
5/31/2011	4:30:13 PM	PH3 valve closed
5/31/2011	4:30:13 PM	SiCl4 pre valve closed
5/31/2011	4:30:13 PM	SiCl4 post valve closed
5/31/2011	4:30:13 PM	Bubbler valve closed
5/31/2011	4:30:13 PM	Helium valve opened
5/31/2011	4:30:13 PM	Main Vac valve opened
5/31/2011	4:30:13 PM	Bypass valve opened
5/31/2011	4:30:13 PM	Helium MFC set to  100.000000
5/31/2011	4:30:13 PM	H2 MFC set to  0.000000
5/31/2011	4:30:13 PM	BCl3 MFC set to  0.000000
5/31/2011	4:30:13 PM	PHl3 MFC set to  0.000000
5/31/2011	4:30:13 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:30:13 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:30:13 PM	Tube furnace set to 0
5/31/2011	4:31:13 PM	Helium valve closed
5/31/2011	4:31:13 PM	H2 valve closed
5/31/2011	4:31:13 PM	BCl3 valve closed
5/31/2011	4:31:13 PM	PH3 valve closed
5/31/2011	4:31:13 PM	SiCl4 pre valve closed
5/31/2011	4:31:13 PM	SiCl4 post valve closed
5/31/2011	4:31:13 PM	Bubbler valve closed
5/31/2011	4:31:13 PM	Main Vac valve opened
5/31/2011	4:31:13 PM	Bypass valve opened
5/31/2011	4:31:13 PM	Helium MFC set to  0.000000
5/31/2011	4:31:13 PM	H2 MFC set to  0.000000
5/31/2011	4:31:13 PM	BCl3 MFC set to  0.000000
5/31/2011	4:31:13 PM	PHl3 MFC set to  0.000000
5/31/2011	4:31:13 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:31:13 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:31:13 PM	Tube furnace set to 0
5/31/2011	4:32:13 PM	H2 valve closed
5/31/2011	4:32:13 PM	BCl3 valve closed
5/31/2011	4:32:13 PM	PH3 valve closed
5/31/2011	4:32:13 PM	SiCl4 pre valve closed
5/31/2011	4:32:13 PM	SiCl4 post valve closed
5/31/2011	4:32:13 PM	Bubbler valve closed
5/31/2011	4:32:13 PM	Helium valve opened
5/31/2011	4:32:13 PM	Main Vac valve opened
5/31/2011	4:32:13 PM	Bypass valve opened
5/31/2011	4:32:13 PM	Helium MFC set to  100.000000
5/31/2011	4:32:13 PM	H2 MFC set to  0.000000
5/31/2011	4:32:13 PM	BCl3 MFC set to  0.000000
5/31/2011	4:32:13 PM	PHl3 MFC set to  0.000000
5/31/2011	4:32:13 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:32:13 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:32:14 PM	Tube furnace set to 0
5/31/2011	4:33:14 PM	Helium valve closed
5/31/2011	4:33:14 PM	H2 valve closed
5/31/2011	4:33:14 PM	BCl3 valve closed
5/31/2011	4:33:14 PM	PH3 valve closed
5/31/2011	4:33:14 PM	SiCl4 pre valve closed
5/31/2011	4:33:14 PM	SiCl4 post valve closed
5/31/2011	4:33:14 PM	Bubbler valve closed
5/31/2011	4:33:14 PM	Main Vac valve opened
5/31/2011	4:33:14 PM	Bypass valve opened
5/31/2011	4:33:14 PM	Helium MFC set to  0.000000
5/31/2011	4:33:14 PM	H2 MFC set to  0.000000
5/31/2011	4:33:14 PM	BCl3 MFC set to  0.000000
5/31/2011	4:33:14 PM	PHl3 MFC set to  0.000000
5/31/2011	4:33:14 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:33:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:33:14 PM	Tube furnace set to 0
5/31/2011	4:34:14 PM	H2 valve closed
5/31/2011	4:34:14 PM	BCl3 valve closed
5/31/2011	4:34:14 PM	PH3 valve closed
5/31/2011	4:34:14 PM	SiCl4 pre valve closed
5/31/2011	4:34:14 PM	SiCl4 post valve closed
5/31/2011	4:34:14 PM	Bubbler valve closed
5/31/2011	4:34:14 PM	Helium valve opened
5/31/2011	4:34:14 PM	Main Vac valve opened
5/31/2011	4:34:14 PM	Bypass valve opened
5/31/2011	4:34:14 PM	Helium MFC set to  100.000000
5/31/2011	4:34:14 PM	H2 MFC set to  0.000000
5/31/2011	4:34:14 PM	BCl3 MFC set to  0.000000
5/31/2011	4:34:14 PM	PHl3 MFC set to  0.000000
5/31/2011	4:34:14 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:34:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:34:14 PM	Tube furnace set to 0
5/31/2011	4:35:14 PM	Helium valve closed
5/31/2011	4:35:14 PM	H2 valve closed
5/31/2011	4:35:14 PM	BCl3 valve closed
5/31/2011	4:35:14 PM	PH3 valve closed
5/31/2011	4:35:14 PM	SiCl4 pre valve closed
5/31/2011	4:35:14 PM	SiCl4 post valve closed
5/31/2011	4:35:14 PM	Bubbler valve closed
5/31/2011	4:35:14 PM	Main Vac valve opened
5/31/2011	4:35:14 PM	Bypass valve opened
5/31/2011	4:35:14 PM	Helium MFC set to  0.000000
5/31/2011	4:35:14 PM	H2 MFC set to  0.000000
5/31/2011	4:35:14 PM	BCl3 MFC set to  0.000000
5/31/2011	4:35:14 PM	PHl3 MFC set to  0.000000
5/31/2011	4:35:14 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:35:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:35:14 PM	Tube furnace set to 0
5/31/2011	4:36:14 PM	H2 valve closed
5/31/2011	4:36:14 PM	BCl3 valve closed
5/31/2011	4:36:14 PM	PH3 valve closed
5/31/2011	4:36:14 PM	SiCl4 pre valve closed
5/31/2011	4:36:14 PM	SiCl4 post valve closed
5/31/2011	4:36:14 PM	Bubbler valve closed
5/31/2011	4:36:14 PM	Helium valve opened
5/31/2011	4:36:14 PM	Main Vac valve opened
5/31/2011	4:36:14 PM	Bypass valve opened
5/31/2011	4:36:14 PM	Helium MFC set to  100.000000
5/31/2011	4:36:14 PM	H2 MFC set to  0.000000
5/31/2011	4:36:14 PM	BCl3 MFC set to  0.000000
5/31/2011	4:36:14 PM	PHl3 MFC set to  0.000000
5/31/2011	4:36:14 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:36:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:36:14 PM	Tube furnace set to 0
5/31/2011	4:37:15 PM	Helium valve closed
5/31/2011	4:37:15 PM	H2 valve closed
5/31/2011	4:37:15 PM	BCl3 valve closed
5/31/2011	4:37:15 PM	PH3 valve closed
5/31/2011	4:37:15 PM	SiCl4 pre valve closed
5/31/2011	4:37:15 PM	SiCl4 post valve closed
5/31/2011	4:37:15 PM	Bubbler valve closed
5/31/2011	4:37:15 PM	Main Vac valve opened
5/31/2011	4:37:15 PM	Bypass valve opened
5/31/2011	4:37:15 PM	Helium MFC set to  0.000000
5/31/2011	4:37:15 PM	H2 MFC set to  0.000000
5/31/2011	4:37:15 PM	BCl3 MFC set to  0.000000
5/31/2011	4:37:15 PM	PHl3 MFC set to  0.000000
5/31/2011	4:37:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:37:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:37:15 PM	Tube furnace set to 0
5/31/2011	4:38:15 PM	H2 valve closed
5/31/2011	4:38:15 PM	BCl3 valve closed
5/31/2011	4:38:15 PM	PH3 valve closed
5/31/2011	4:38:15 PM	SiCl4 pre valve closed
5/31/2011	4:38:15 PM	SiCl4 post valve closed
5/31/2011	4:38:15 PM	Bubbler valve closed
5/31/2011	4:38:15 PM	Helium valve opened
5/31/2011	4:38:15 PM	Main Vac valve opened
5/31/2011	4:38:15 PM	Bypass valve opened
5/31/2011	4:38:15 PM	Helium MFC set to  100.000000
5/31/2011	4:38:15 PM	H2 MFC set to  0.000000
5/31/2011	4:38:15 PM	BCl3 MFC set to  0.000000
5/31/2011	4:38:15 PM	PHl3 MFC set to  0.000000
5/31/2011	4:38:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:38:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:38:15 PM	Tube furnace set to 0
5/31/2011	4:39:15 PM	Helium valve closed
5/31/2011	4:39:15 PM	H2 valve closed
5/31/2011	4:39:15 PM	BCl3 valve closed
5/31/2011	4:39:15 PM	PH3 valve closed
5/31/2011	4:39:15 PM	SiCl4 pre valve closed
5/31/2011	4:39:15 PM	SiCl4 post valve closed
5/31/2011	4:39:15 PM	Bubbler valve closed
5/31/2011	4:39:15 PM	Main Vac valve opened
5/31/2011	4:39:15 PM	Bypass valve opened
5/31/2011	4:39:15 PM	Helium MFC set to  0.000000
5/31/2011	4:39:15 PM	H2 MFC set to  0.000000
5/31/2011	4:39:15 PM	BCl3 MFC set to  0.000000
5/31/2011	4:39:15 PM	PHl3 MFC set to  0.000000
5/31/2011	4:39:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:39:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:39:15 PM	Tube furnace set to 0
5/31/2011	4:40:15 PM	H2 valve closed
5/31/2011	4:40:15 PM	BCl3 valve closed
5/31/2011	4:40:15 PM	PH3 valve closed
5/31/2011	4:40:15 PM	SiCl4 pre valve closed
5/31/2011	4:40:15 PM	SiCl4 post valve closed
5/31/2011	4:40:15 PM	Bubbler valve closed
5/31/2011	4:40:15 PM	Helium valve opened
5/31/2011	4:40:15 PM	Main Vac valve opened
5/31/2011	4:40:15 PM	Bypass valve opened
5/31/2011	4:40:15 PM	Helium MFC set to  100.000000
5/31/2011	4:40:15 PM	H2 MFC set to  0.000000
5/31/2011	4:40:15 PM	BCl3 MFC set to  0.000000
5/31/2011	4:40:15 PM	PHl3 MFC set to  0.000000
5/31/2011	4:40:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:40:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:40:15 PM	Tube furnace set to 0
5/31/2011	4:40:31 PM	Helium valve closed
5/31/2011	4:40:31 PM	H2 valve closed
5/31/2011	4:40:31 PM	BCl3 valve closed
5/31/2011	4:40:31 PM	PH3 valve closed
5/31/2011	4:40:31 PM	SiCl4 pre valve closed
5/31/2011	4:40:31 PM	SiCl4 post valve closed
5/31/2011	4:40:31 PM	Bubbler valve closed
5/31/2011	4:40:31 PM	Main Vac valve opened
5/31/2011	4:40:31 PM	Bypass valve opened
5/31/2011	4:40:31 PM	Helium MFC set to  0.000000
5/31/2011	4:40:31 PM	H2 MFC set to  0.000000
5/31/2011	4:40:31 PM	BCl3 MFC set to  0.000000
5/31/2011	4:40:31 PM	PHl3 MFC set to  0.000000
5/31/2011	4:40:31 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:40:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:40:31 PM	Tube furnace set to 0
5/31/2011	4:41:31 PM	H2 valve closed
5/31/2011	4:41:31 PM	BCl3 valve closed
5/31/2011	4:41:31 PM	PH3 valve closed
5/31/2011	4:41:31 PM	SiCl4 pre valve closed
5/31/2011	4:41:31 PM	SiCl4 post valve closed
5/31/2011	4:41:31 PM	Bubbler valve closed
5/31/2011	4:41:31 PM	Helium valve opened
5/31/2011	4:41:31 PM	Main Vac valve opened
5/31/2011	4:41:31 PM	Bypass valve opened
5/31/2011	4:41:31 PM	Helium MFC set to  100.000000
5/31/2011	4:41:31 PM	H2 MFC set to  0.000000
5/31/2011	4:41:31 PM	BCl3 MFC set to  0.000000
5/31/2011	4:41:31 PM	PHl3 MFC set to  0.000000
5/31/2011	4:41:31 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:41:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:41:31 PM	Tube furnace set to 0
5/31/2011	4:42:31 PM	Helium valve closed
5/31/2011	4:42:31 PM	H2 valve closed
5/31/2011	4:42:31 PM	BCl3 valve closed
5/31/2011	4:42:31 PM	PH3 valve closed
5/31/2011	4:42:31 PM	SiCl4 pre valve closed
5/31/2011	4:42:31 PM	SiCl4 post valve closed
5/31/2011	4:42:31 PM	Bubbler valve closed
5/31/2011	4:42:31 PM	Main Vac valve opened
5/31/2011	4:42:31 PM	Bypass valve opened
5/31/2011	4:42:31 PM	Helium MFC set to  0.000000
5/31/2011	4:42:32 PM	H2 MFC set to  0.000000
5/31/2011	4:42:32 PM	BCl3 MFC set to  0.000000
5/31/2011	4:42:32 PM	PHl3 MFC set to  0.000000
5/31/2011	4:42:32 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:42:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:42:32 PM	Tube furnace set to 0
5/31/2011	4:43:32 PM	H2 valve closed
5/31/2011	4:43:32 PM	BCl3 valve closed
5/31/2011	4:43:32 PM	PH3 valve closed
5/31/2011	4:43:32 PM	SiCl4 pre valve closed
5/31/2011	4:43:32 PM	SiCl4 post valve closed
5/31/2011	4:43:32 PM	Bubbler valve closed
5/31/2011	4:43:32 PM	Helium valve opened
5/31/2011	4:43:32 PM	Main Vac valve opened
5/31/2011	4:43:32 PM	Bypass valve opened
5/31/2011	4:43:32 PM	Helium MFC set to  100.000000
5/31/2011	4:43:32 PM	H2 MFC set to  0.000000
5/31/2011	4:43:32 PM	BCl3 MFC set to  0.000000
5/31/2011	4:43:32 PM	PHl3 MFC set to  0.000000
5/31/2011	4:43:32 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:43:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:43:32 PM	Tube furnace set to 0
5/31/2011	4:44:32 PM	Helium valve closed
5/31/2011	4:44:32 PM	H2 valve closed
5/31/2011	4:44:32 PM	BCl3 valve closed
5/31/2011	4:44:32 PM	PH3 valve closed
5/31/2011	4:44:32 PM	SiCl4 pre valve closed
5/31/2011	4:44:32 PM	SiCl4 post valve closed
5/31/2011	4:44:32 PM	Bubbler valve closed
5/31/2011	4:44:32 PM	Main Vac valve opened
5/31/2011	4:44:32 PM	Bypass valve opened
5/31/2011	4:44:32 PM	Helium MFC set to  0.000000
5/31/2011	4:44:32 PM	H2 MFC set to  0.000000
5/31/2011	4:44:32 PM	BCl3 MFC set to  0.000000
5/31/2011	4:44:32 PM	PHl3 MFC set to  0.000000
5/31/2011	4:44:32 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:44:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:44:32 PM	Tube furnace set to 0
5/31/2011	4:44:33 PM	Run finished at 4:44 PM
5/31/2011	4:44:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	4:44:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	4:44:34 PM	Recipe started at 4:44 PM
5/31/2011	4:44:34 PM	Helium valve closed
5/31/2011	4:44:34 PM	H2 valve closed
5/31/2011	4:44:34 PM	BCl3 valve closed
5/31/2011	4:44:34 PM	PH3 valve closed
5/31/2011	4:44:34 PM	SiCl4 pre valve closed
5/31/2011	4:44:34 PM	SiCl4 post valve closed
5/31/2011	4:44:34 PM	Main Vac valve closed
5/31/2011	4:44:34 PM	Bubbler valve closed
5/31/2011	4:44:34 PM	Bypass valve opened
5/31/2011	4:44:34 PM	Helium MFC set to  0.000000
5/31/2011	4:44:34 PM	H2 MFC set to  0.000000
5/31/2011	4:44:34 PM	BCl3 MFC set to  0.000000
5/31/2011	4:44:34 PM	PHl3 MFC set to  0.000000
5/31/2011	4:44:34 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:44:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:44:34 PM	Tube furnace set to 0
5/31/2011	4:44:34 PM	Helium valve closed
5/31/2011	4:44:34 PM	H2 valve closed
5/31/2011	4:44:34 PM	BCl3 valve closed
5/31/2011	4:44:34 PM	PH3 valve closed
5/31/2011	4:44:34 PM	SiCl4 pre valve closed
5/31/2011	4:44:34 PM	SiCl4 post valve closed
5/31/2011	4:44:34 PM	Bubbler valve closed
5/31/2011	4:44:34 PM	Main Vac valve opened
5/31/2011	4:44:34 PM	Bypass valve opened
5/31/2011	4:44:34 PM	Helium MFC set to  0.000000
5/31/2011	4:44:34 PM	H2 MFC set to  0.000000
5/31/2011	4:44:34 PM	BCl3 MFC set to  0.000000
5/31/2011	4:44:34 PM	PHl3 MFC set to  0.000000
5/31/2011	4:44:34 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:44:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:44:34 PM	Tube furnace set to 0
5/31/2011	4:44:35 PM	Run finished at 4:44 PM
5/31/2011	4:44:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	4:47:49 PM	Helium MFC set to  50.000000
5/31/2011	4:47:52 PM	Helium valve opened
5/31/2011	4:54:05 PM	Helium valve closed
5/31/2011	4:55:47 PM	Helium MFC set to  0.000000
5/31/2011	4:55:49 PM	Main Vac valve closed
5/31/2011	4:55:50 PM	Bypass valve closed
5/31/2011	4:56:02 PM	Bypass valve opened
5/31/2011	4:56:03 PM	Main Vac valve opened
5/31/2011	4:56:14 PM	Recipe started at 4:56 PM
5/31/2011	4:56:15 PM	Helium valve closed
5/31/2011	4:56:15 PM	BCl3 valve closed
5/31/2011	4:56:15 PM	PH3 valve closed
5/31/2011	4:56:15 PM	SiCl4 pre valve closed
5/31/2011	4:56:15 PM	SiCl4 post valve closed
5/31/2011	4:56:15 PM	Main Vac valve closed
5/31/2011	4:56:15 PM	Bypass valve closed
5/31/2011	4:56:15 PM	Bubbler valve closed
5/31/2011	4:56:15 PM	H2 valve opened
5/31/2011	4:56:15 PM	Helium MFC set to  0.000000
5/31/2011	4:56:15 PM	H2 MFC set to  500.000000
5/31/2011	4:56:15 PM	BCl3 MFC set to  0.000000
5/31/2011	4:56:15 PM	PHl3 MFC set to  0.000000
5/31/2011	4:56:15 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:56:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:56:15 PM	Tube furnace set to 200
5/31/2011	4:57:34 PM	Helium valve closed
5/31/2011	4:57:34 PM	BCl3 valve closed
5/31/2011	4:57:34 PM	PH3 valve closed
5/31/2011	4:57:34 PM	SiCl4 pre valve closed
5/31/2011	4:57:34 PM	SiCl4 post valve closed
5/31/2011	4:57:34 PM	Main Vac valve closed
5/31/2011	4:57:34 PM	Bypass valve closed
5/31/2011	4:57:34 PM	H2 valve opened
5/31/2011	4:57:34 PM	Bubbler valve opened
5/31/2011	4:57:34 PM	Helium MFC set to  0.000000
5/31/2011	4:57:34 PM	H2 MFC set to  400.000000
5/31/2011	4:57:34 PM	BCl3 MFC set to  0.000000
5/31/2011	4:57:34 PM	PHl3 MFC set to  0.000000
5/31/2011	4:57:34 PM	SiCl4 MFC set to  0.000000
5/31/2011	4:57:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	4:57:34 PM	Tube furnace set to 1000
5/31/2011	5:20:34 PM	Helium valve closed
5/31/2011	5:20:34 PM	PH3 valve closed
5/31/2011	5:20:34 PM	Main Vac valve closed
5/31/2011	5:20:34 PM	Bypass valve closed
5/31/2011	5:20:34 PM	H2 valve opened
5/31/2011	5:20:34 PM	BCl3 valve opened
5/31/2011	5:20:34 PM	SiCl4 pre valve opened
5/31/2011	5:20:34 PM	SiCl4 post valve opened
5/31/2011	5:20:34 PM	Bubbler valve opened
5/31/2011	5:20:34 PM	Helium MFC set to  0.000000
5/31/2011	5:20:34 PM	H2 MFC set to  400.000000
5/31/2011	5:20:34 PM	BCl3 MFC set to  2.400000
5/31/2011	5:20:34 PM	PHl3 MFC set to  0.000000
5/31/2011	5:20:34 PM	SiCl4 MFC set to  40.000000
5/31/2011	5:20:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	5:20:34 PM	Tube furnace set to 1000
5/31/2011	5:40:34 PM	Helium valve closed
5/31/2011	5:40:34 PM	BCl3 valve closed
5/31/2011	5:40:34 PM	PH3 valve closed
5/31/2011	5:40:34 PM	SiCl4 pre valve closed
5/31/2011	5:40:34 PM	SiCl4 post valve closed
5/31/2011	5:40:34 PM	Main Vac valve closed
5/31/2011	5:40:34 PM	Bypass valve closed
5/31/2011	5:40:34 PM	H2 valve opened
5/31/2011	5:40:34 PM	Bubbler valve opened
5/31/2011	5:40:34 PM	Helium MFC set to  0.000000
5/31/2011	5:40:34 PM	H2 MFC set to  400.000000
5/31/2011	5:40:34 PM	BCl3 MFC set to  0.000000
5/31/2011	5:40:34 PM	PHl3 MFC set to  0.000000
5/31/2011	5:40:34 PM	SiCl4 MFC set to  0.000000
5/31/2011	5:40:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	5:40:34 PM	Tube furnace set to 0
5/31/2011	5:41:35 PM	H2 valve closed
5/31/2011	5:41:35 PM	BCl3 valve closed
5/31/2011	5:41:35 PM	PH3 valve closed
5/31/2011	5:41:35 PM	SiCl4 pre valve closed
5/31/2011	5:41:35 PM	SiCl4 post valve closed
5/31/2011	5:41:35 PM	Main Vac valve closed
5/31/2011	5:41:35 PM	Bypass valve closed
5/31/2011	5:41:35 PM	Helium valve opened
5/31/2011	5:41:35 PM	Bubbler valve opened
5/31/2011	5:41:35 PM	Helium MFC set to  400.000000
5/31/2011	5:41:35 PM	H2 MFC set to  0.000000
5/31/2011	5:41:35 PM	BCl3 MFC set to  0.000000
5/31/2011	5:41:35 PM	PHl3 MFC set to  0.000000
5/31/2011	5:41:35 PM	SiCl4 MFC set to  0.000000
5/31/2011	5:41:35 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	5:41:35 PM	Tube furnace set to 0
5/31/2011	6:01:35 PM	Helium valve closed
5/31/2011	6:01:35 PM	H2 valve closed
5/31/2011	6:01:35 PM	BCl3 valve closed
5/31/2011	6:01:35 PM	PH3 valve closed
5/31/2011	6:01:35 PM	SiCl4 pre valve closed
5/31/2011	6:01:35 PM	SiCl4 post valve closed
5/31/2011	6:01:35 PM	Main Vac valve closed
5/31/2011	6:01:35 PM	Bypass valve closed
5/31/2011	6:01:35 PM	Bubbler valve closed
5/31/2011	6:01:35 PM	Helium MFC set to  0.000000
5/31/2011	6:01:35 PM	H2 MFC set to  0.000000
5/31/2011	6:01:35 PM	BCl3 MFC set to  0.000000
5/31/2011	6:01:35 PM	PHl3 MFC set to  0.000000
5/31/2011	6:01:35 PM	SiCl4 MFC set to  0.000000
5/31/2011	6:01:35 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	6:01:35 PM	Tube furnace set to 0
5/31/2011	6:01:35 PM	Run finished at 6:01 PM
5/31/2011	7:01:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	7:01:01 PM	Recipe started at 7:01 PM
5/31/2011	7:01:01 PM	H2 valve closed
5/31/2011	7:01:01 PM	BCl3 valve closed
5/31/2011	7:01:01 PM	PH3 valve closed
5/31/2011	7:01:01 PM	SiCl4 pre valve closed
5/31/2011	7:01:01 PM	SiCl4 post valve closed
5/31/2011	7:01:01 PM	Main Vac valve closed
5/31/2011	7:01:01 PM	Bypass valve closed
5/31/2011	7:01:01 PM	Bubbler valve closed
5/31/2011	7:01:01 PM	Helium valve opened
5/31/2011	7:01:01 PM	Helium MFC set to  500.000000
5/31/2011	7:01:01 PM	H2 MFC set to  0.000000
5/31/2011	7:01:01 PM	BCl3 MFC set to  0.000000
5/31/2011	7:01:01 PM	PHl3 MFC set to  0.000000
5/31/2011	7:01:01 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:01:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:01:01 PM	Tube furnace set to 0
5/31/2011	7:01:11 PM	Helium valve closed
5/31/2011	7:01:11 PM	H2 valve closed
5/31/2011	7:01:11 PM	BCl3 valve closed
5/31/2011	7:01:11 PM	PH3 valve closed
5/31/2011	7:01:11 PM	SiCl4 pre valve closed
5/31/2011	7:01:11 PM	SiCl4 post valve closed
5/31/2011	7:01:11 PM	Main Vac valve closed
5/31/2011	7:01:11 PM	Bypass valve closed
5/31/2011	7:01:11 PM	Bubbler valve closed
5/31/2011	7:01:11 PM	Helium MFC set to  0.000000
5/31/2011	7:01:11 PM	H2 MFC set to  0.000000
5/31/2011	7:01:11 PM	BCl3 MFC set to  0.000000
5/31/2011	7:01:11 PM	PHl3 MFC set to  0.000000
5/31/2011	7:01:11 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:01:11 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:01:11 PM	Tube furnace set to 0
5/31/2011	7:01:11 PM	Run finished at 7:01 PM
5/31/2011	7:01:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	7:03:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	7:03:22 PM	Recipe started at 7:03 PM
5/31/2011	7:03:22 PM	Helium valve closed
5/31/2011	7:03:22 PM	H2 valve closed
5/31/2011	7:03:22 PM	BCl3 valve closed
5/31/2011	7:03:22 PM	PH3 valve closed
5/31/2011	7:03:22 PM	SiCl4 pre valve closed
5/31/2011	7:03:22 PM	SiCl4 post valve closed
5/31/2011	7:03:22 PM	Main Vac valve closed
5/31/2011	7:03:22 PM	Bubbler valve closed
5/31/2011	7:03:22 PM	Bypass valve opened
5/31/2011	7:03:22 PM	Helium MFC set to  0.000000
5/31/2011	7:03:22 PM	H2 MFC set to  0.000000
5/31/2011	7:03:22 PM	BCl3 MFC set to  0.000000
5/31/2011	7:03:22 PM	PHl3 MFC set to  0.000000
5/31/2011	7:03:22 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:03:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:03:23 PM	Tube furnace set to 0
5/31/2011	7:03:55 PM	Helium valve closed
5/31/2011	7:03:55 PM	H2 valve closed
5/31/2011	7:03:55 PM	BCl3 valve closed
5/31/2011	7:03:55 PM	PH3 valve closed
5/31/2011	7:03:55 PM	SiCl4 pre valve closed
5/31/2011	7:03:55 PM	SiCl4 post valve closed
5/31/2011	7:03:55 PM	Bubbler valve closed
5/31/2011	7:03:55 PM	Main Vac valve opened
5/31/2011	7:03:55 PM	Bypass valve opened
5/31/2011	7:03:55 PM	Helium MFC set to  0.000000
5/31/2011	7:03:55 PM	H2 MFC set to  0.000000
5/31/2011	7:03:55 PM	BCl3 MFC set to  0.000000
5/31/2011	7:03:55 PM	PHl3 MFC set to  0.000000
5/31/2011	7:03:55 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:03:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:03:55 PM	Tube furnace set to 0
5/31/2011	7:03:56 PM	Run finished at 7:03 PM
5/31/2011	7:03:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	7:17:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	7:17:47 PM	Recipe started at 7:17 PM
5/31/2011	7:17:47 PM	H2 valve closed
5/31/2011	7:17:47 PM	BCl3 valve closed
5/31/2011	7:17:47 PM	PH3 valve closed
5/31/2011	7:17:47 PM	SiCl4 pre valve closed
5/31/2011	7:17:47 PM	SiCl4 post valve closed
5/31/2011	7:17:47 PM	Main Vac valve closed
5/31/2011	7:17:47 PM	Bypass valve closed
5/31/2011	7:17:47 PM	Bubbler valve closed
5/31/2011	7:17:47 PM	Helium valve opened
5/31/2011	7:17:47 PM	Helium MFC set to  500.000000
5/31/2011	7:17:47 PM	H2 MFC set to  0.000000
5/31/2011	7:17:47 PM	BCl3 MFC set to  0.000000
5/31/2011	7:17:47 PM	PHl3 MFC set to  0.000000
5/31/2011	7:17:47 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:17:47 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:17:47 PM	Tube furnace set to 0
5/31/2011	7:19:05 PM	Helium valve closed
5/31/2011	7:19:05 PM	H2 valve closed
5/31/2011	7:19:05 PM	BCl3 valve closed
5/31/2011	7:19:05 PM	PH3 valve closed
5/31/2011	7:19:05 PM	SiCl4 pre valve closed
5/31/2011	7:19:05 PM	SiCl4 post valve closed
5/31/2011	7:19:05 PM	Main Vac valve closed
5/31/2011	7:19:05 PM	Bypass valve closed
5/31/2011	7:19:05 PM	Bubbler valve closed
5/31/2011	7:19:05 PM	Helium MFC set to  0.000000
5/31/2011	7:19:05 PM	H2 MFC set to  0.000000
5/31/2011	7:19:05 PM	BCl3 MFC set to  0.000000
5/31/2011	7:19:05 PM	PHl3 MFC set to  0.000000
5/31/2011	7:19:05 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:19:05 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:19:05 PM	Tube furnace set to 0
5/31/2011	7:19:05 PM	Run finished at 7:19 PM
5/31/2011	7:19:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	7:21:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	7:21:09 PM	Recipe started at 7:21 PM
5/31/2011	7:21:09 PM	Helium valve closed
5/31/2011	7:21:09 PM	H2 valve closed
5/31/2011	7:21:09 PM	BCl3 valve closed
5/31/2011	7:21:09 PM	PH3 valve closed
5/31/2011	7:21:09 PM	SiCl4 pre valve closed
5/31/2011	7:21:09 PM	SiCl4 post valve closed
5/31/2011	7:21:09 PM	Main Vac valve closed
5/31/2011	7:21:09 PM	Bubbler valve closed
5/31/2011	7:21:09 PM	Bypass valve opened
5/31/2011	7:21:09 PM	Helium MFC set to  0.000000
5/31/2011	7:21:09 PM	H2 MFC set to  0.000000
5/31/2011	7:21:09 PM	BCl3 MFC set to  0.000000
5/31/2011	7:21:09 PM	PHl3 MFC set to  0.000000
5/31/2011	7:21:09 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:21:09 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:21:09 PM	Tube furnace set to 0
5/31/2011	7:21:41 PM	Helium valve closed
5/31/2011	7:21:41 PM	H2 valve closed
5/31/2011	7:21:41 PM	BCl3 valve closed
5/31/2011	7:21:41 PM	PH3 valve closed
5/31/2011	7:21:41 PM	SiCl4 pre valve closed
5/31/2011	7:21:41 PM	SiCl4 post valve closed
5/31/2011	7:21:41 PM	Bubbler valve closed
5/31/2011	7:21:41 PM	Main Vac valve opened
5/31/2011	7:21:41 PM	Bypass valve opened
5/31/2011	7:21:41 PM	Helium MFC set to  0.000000
5/31/2011	7:21:41 PM	H2 MFC set to  0.000000
5/31/2011	7:21:41 PM	BCl3 MFC set to  0.000000
5/31/2011	7:21:41 PM	PHl3 MFC set to  0.000000
5/31/2011	7:21:41 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:21:41 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:21:41 PM	Tube furnace set to 0
5/31/2011	7:21:42 PM	Run finished at 7:21 PM
5/31/2011	7:21:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	7:21:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	7:21:57 PM	Recipe started at 7:21 PM
5/31/2011	7:21:57 PM	Helium valve closed
5/31/2011	7:21:57 PM	H2 valve closed
5/31/2011	7:21:57 PM	BCl3 valve closed
5/31/2011	7:21:57 PM	PH3 valve closed
5/31/2011	7:21:57 PM	SiCl4 pre valve closed
5/31/2011	7:21:57 PM	SiCl4 post valve closed
5/31/2011	7:21:57 PM	Main Vac valve closed
5/31/2011	7:21:57 PM	Bubbler valve closed
5/31/2011	7:21:57 PM	Bypass valve opened
5/31/2011	7:21:57 PM	Helium MFC set to  0.000000
5/31/2011	7:21:57 PM	H2 MFC set to  0.000000
5/31/2011	7:21:57 PM	BCl3 MFC set to  0.000000
5/31/2011	7:21:57 PM	PHl3 MFC set to  0.000000
5/31/2011	7:21:57 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:21:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:21:57 PM	Tube furnace set to 0
5/31/2011	7:21:58 PM	Helium valve closed
5/31/2011	7:21:58 PM	H2 valve closed
5/31/2011	7:21:58 PM	BCl3 valve closed
5/31/2011	7:21:58 PM	PH3 valve closed
5/31/2011	7:21:58 PM	SiCl4 pre valve closed
5/31/2011	7:21:58 PM	SiCl4 post valve closed
5/31/2011	7:21:58 PM	Bubbler valve closed
5/31/2011	7:21:58 PM	Main Vac valve opened
5/31/2011	7:21:58 PM	Bypass valve opened
5/31/2011	7:21:58 PM	Helium MFC set to  0.000000
5/31/2011	7:21:58 PM	H2 MFC set to  0.000000
5/31/2011	7:21:58 PM	BCl3 MFC set to  0.000000
5/31/2011	7:21:58 PM	PHl3 MFC set to  0.000000
5/31/2011	7:21:58 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:21:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:21:58 PM	Tube furnace set to 0
5/31/2011	7:22:58 PM	H2 valve closed
5/31/2011	7:22:58 PM	BCl3 valve closed
5/31/2011	7:22:58 PM	PH3 valve closed
5/31/2011	7:22:58 PM	SiCl4 pre valve closed
5/31/2011	7:22:58 PM	SiCl4 post valve closed
5/31/2011	7:22:58 PM	Bubbler valve closed
5/31/2011	7:22:58 PM	Helium valve opened
5/31/2011	7:22:58 PM	Main Vac valve opened
5/31/2011	7:22:58 PM	Bypass valve opened
5/31/2011	7:22:58 PM	Helium MFC set to  100.000000
5/31/2011	7:22:58 PM	H2 MFC set to  0.000000
5/31/2011	7:22:58 PM	BCl3 MFC set to  0.000000
5/31/2011	7:22:58 PM	PHl3 MFC set to  0.000000
5/31/2011	7:22:58 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:22:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:22:58 PM	Tube furnace set to 0
5/31/2011	7:23:58 PM	Helium valve closed
5/31/2011	7:23:58 PM	H2 valve closed
5/31/2011	7:23:58 PM	BCl3 valve closed
5/31/2011	7:23:58 PM	PH3 valve closed
5/31/2011	7:23:58 PM	SiCl4 pre valve closed
5/31/2011	7:23:58 PM	SiCl4 post valve closed
5/31/2011	7:23:58 PM	Bubbler valve closed
5/31/2011	7:23:58 PM	Main Vac valve opened
5/31/2011	7:23:58 PM	Bypass valve opened
5/31/2011	7:23:58 PM	Helium MFC set to  0.000000
5/31/2011	7:23:58 PM	H2 MFC set to  0.000000
5/31/2011	7:23:58 PM	BCl3 MFC set to  0.000000
5/31/2011	7:23:58 PM	PHl3 MFC set to  0.000000
5/31/2011	7:23:58 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:23:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:23:58 PM	Tube furnace set to 0
5/31/2011	7:24:58 PM	H2 valve closed
5/31/2011	7:24:58 PM	BCl3 valve closed
5/31/2011	7:24:58 PM	PH3 valve closed
5/31/2011	7:24:58 PM	SiCl4 pre valve closed
5/31/2011	7:24:58 PM	SiCl4 post valve closed
5/31/2011	7:24:58 PM	Bubbler valve closed
5/31/2011	7:24:58 PM	Helium valve opened
5/31/2011	7:24:58 PM	Main Vac valve opened
5/31/2011	7:24:58 PM	Bypass valve opened
5/31/2011	7:24:58 PM	Helium MFC set to  100.000000
5/31/2011	7:24:58 PM	H2 MFC set to  0.000000
5/31/2011	7:24:58 PM	BCl3 MFC set to  0.000000
5/31/2011	7:24:58 PM	PHl3 MFC set to  0.000000
5/31/2011	7:24:58 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:24:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:24:58 PM	Tube furnace set to 0
5/31/2011	7:25:58 PM	Helium valve closed
5/31/2011	7:25:58 PM	H2 valve closed
5/31/2011	7:25:58 PM	BCl3 valve closed
5/31/2011	7:25:58 PM	PH3 valve closed
5/31/2011	7:25:58 PM	SiCl4 pre valve closed
5/31/2011	7:25:58 PM	SiCl4 post valve closed
5/31/2011	7:25:58 PM	Bubbler valve closed
5/31/2011	7:25:58 PM	Main Vac valve opened
5/31/2011	7:25:58 PM	Bypass valve opened
5/31/2011	7:25:58 PM	Helium MFC set to  0.000000
5/31/2011	7:25:58 PM	H2 MFC set to  0.000000
5/31/2011	7:25:58 PM	BCl3 MFC set to  0.000000
5/31/2011	7:25:58 PM	PHl3 MFC set to  0.000000
5/31/2011	7:25:58 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:25:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:25:59 PM	Tube furnace set to 0
5/31/2011	7:26:59 PM	H2 valve closed
5/31/2011	7:26:59 PM	BCl3 valve closed
5/31/2011	7:26:59 PM	PH3 valve closed
5/31/2011	7:26:59 PM	SiCl4 pre valve closed
5/31/2011	7:26:59 PM	SiCl4 post valve closed
5/31/2011	7:26:59 PM	Bubbler valve closed
5/31/2011	7:26:59 PM	Helium valve opened
5/31/2011	7:26:59 PM	Main Vac valve opened
5/31/2011	7:26:59 PM	Bypass valve opened
5/31/2011	7:26:59 PM	Helium MFC set to  100.000000
5/31/2011	7:26:59 PM	H2 MFC set to  0.000000
5/31/2011	7:26:59 PM	BCl3 MFC set to  0.000000
5/31/2011	7:26:59 PM	PHl3 MFC set to  0.000000
5/31/2011	7:26:59 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:26:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:26:59 PM	Tube furnace set to 0
5/31/2011	7:27:59 PM	Helium valve closed
5/31/2011	7:27:59 PM	H2 valve closed
5/31/2011	7:27:59 PM	BCl3 valve closed
5/31/2011	7:27:59 PM	PH3 valve closed
5/31/2011	7:27:59 PM	SiCl4 pre valve closed
5/31/2011	7:27:59 PM	SiCl4 post valve closed
5/31/2011	7:27:59 PM	Bubbler valve closed
5/31/2011	7:27:59 PM	Main Vac valve opened
5/31/2011	7:27:59 PM	Bypass valve opened
5/31/2011	7:27:59 PM	Helium MFC set to  0.000000
5/31/2011	7:27:59 PM	H2 MFC set to  0.000000
5/31/2011	7:27:59 PM	BCl3 MFC set to  0.000000
5/31/2011	7:27:59 PM	PHl3 MFC set to  0.000000
5/31/2011	7:27:59 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:27:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:27:59 PM	Tube furnace set to 0
5/31/2011	7:28:59 PM	H2 valve closed
5/31/2011	7:28:59 PM	BCl3 valve closed
5/31/2011	7:28:59 PM	PH3 valve closed
5/31/2011	7:28:59 PM	SiCl4 pre valve closed
5/31/2011	7:28:59 PM	SiCl4 post valve closed
5/31/2011	7:28:59 PM	Bubbler valve closed
5/31/2011	7:28:59 PM	Helium valve opened
5/31/2011	7:28:59 PM	Main Vac valve opened
5/31/2011	7:28:59 PM	Bypass valve opened
5/31/2011	7:28:59 PM	Helium MFC set to  100.000000
5/31/2011	7:28:59 PM	H2 MFC set to  0.000000
5/31/2011	7:28:59 PM	BCl3 MFC set to  0.000000
5/31/2011	7:28:59 PM	PHl3 MFC set to  0.000000
5/31/2011	7:28:59 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:28:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:28:59 PM	Tube furnace set to 0
5/31/2011	7:29:59 PM	Helium valve closed
5/31/2011	7:29:59 PM	H2 valve closed
5/31/2011	7:29:59 PM	BCl3 valve closed
5/31/2011	7:29:59 PM	PH3 valve closed
5/31/2011	7:29:59 PM	SiCl4 pre valve closed
5/31/2011	7:29:59 PM	SiCl4 post valve closed
5/31/2011	7:29:59 PM	Bubbler valve closed
5/31/2011	7:29:59 PM	Main Vac valve opened
5/31/2011	7:29:59 PM	Bypass valve opened
5/31/2011	7:29:59 PM	Helium MFC set to  0.000000
5/31/2011	7:29:59 PM	H2 MFC set to  0.000000
5/31/2011	7:29:59 PM	BCl3 MFC set to  0.000000
5/31/2011	7:29:59 PM	PHl3 MFC set to  0.000000
5/31/2011	7:29:59 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:29:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:29:59 PM	Tube furnace set to 0
5/31/2011	7:30:59 PM	H2 valve closed
5/31/2011	7:30:59 PM	BCl3 valve closed
5/31/2011	7:30:59 PM	PH3 valve closed
5/31/2011	7:30:59 PM	SiCl4 pre valve closed
5/31/2011	7:30:59 PM	SiCl4 post valve closed
5/31/2011	7:30:59 PM	Bubbler valve closed
5/31/2011	7:30:59 PM	Helium valve opened
5/31/2011	7:30:59 PM	Main Vac valve opened
5/31/2011	7:30:59 PM	Bypass valve opened
5/31/2011	7:30:59 PM	Helium MFC set to  100.000000
5/31/2011	7:30:59 PM	H2 MFC set to  0.000000
5/31/2011	7:30:59 PM	BCl3 MFC set to  0.000000
5/31/2011	7:30:59 PM	PHl3 MFC set to  0.000000
5/31/2011	7:30:59 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:30:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:31:00 PM	Tube furnace set to 0
5/31/2011	7:32:00 PM	Helium valve closed
5/31/2011	7:32:00 PM	H2 valve closed
5/31/2011	7:32:00 PM	BCl3 valve closed
5/31/2011	7:32:00 PM	PH3 valve closed
5/31/2011	7:32:00 PM	SiCl4 pre valve closed
5/31/2011	7:32:00 PM	SiCl4 post valve closed
5/31/2011	7:32:00 PM	Bubbler valve closed
5/31/2011	7:32:00 PM	Main Vac valve opened
5/31/2011	7:32:00 PM	Bypass valve opened
5/31/2011	7:32:00 PM	Helium MFC set to  0.000000
5/31/2011	7:32:00 PM	H2 MFC set to  0.000000
5/31/2011	7:32:00 PM	BCl3 MFC set to  0.000000
5/31/2011	7:32:00 PM	PHl3 MFC set to  0.000000
5/31/2011	7:32:00 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:32:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:32:00 PM	Tube furnace set to 0
5/31/2011	7:33:00 PM	H2 valve closed
5/31/2011	7:33:00 PM	BCl3 valve closed
5/31/2011	7:33:00 PM	PH3 valve closed
5/31/2011	7:33:00 PM	SiCl4 pre valve closed
5/31/2011	7:33:00 PM	SiCl4 post valve closed
5/31/2011	7:33:00 PM	Bubbler valve closed
5/31/2011	7:33:00 PM	Helium valve opened
5/31/2011	7:33:00 PM	Main Vac valve opened
5/31/2011	7:33:00 PM	Bypass valve opened
5/31/2011	7:33:00 PM	Helium MFC set to  100.000000
5/31/2011	7:33:00 PM	H2 MFC set to  0.000000
5/31/2011	7:33:00 PM	BCl3 MFC set to  0.000000
5/31/2011	7:33:00 PM	PHl3 MFC set to  0.000000
5/31/2011	7:33:00 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:33:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:33:00 PM	Tube furnace set to 0
5/31/2011	7:34:00 PM	Helium valve closed
5/31/2011	7:34:00 PM	H2 valve closed
5/31/2011	7:34:00 PM	BCl3 valve closed
5/31/2011	7:34:00 PM	PH3 valve closed
5/31/2011	7:34:00 PM	SiCl4 pre valve closed
5/31/2011	7:34:00 PM	SiCl4 post valve closed
5/31/2011	7:34:00 PM	Bubbler valve closed
5/31/2011	7:34:00 PM	Main Vac valve opened
5/31/2011	7:34:00 PM	Bypass valve opened
5/31/2011	7:34:00 PM	Helium MFC set to  0.000000
5/31/2011	7:34:00 PM	H2 MFC set to  0.000000
5/31/2011	7:34:00 PM	BCl3 MFC set to  0.000000
5/31/2011	7:34:00 PM	PHl3 MFC set to  0.000000
5/31/2011	7:34:00 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:34:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:34:00 PM	Tube furnace set to 0
5/31/2011	7:35:00 PM	H2 valve closed
5/31/2011	7:35:00 PM	BCl3 valve closed
5/31/2011	7:35:00 PM	PH3 valve closed
5/31/2011	7:35:00 PM	SiCl4 pre valve closed
5/31/2011	7:35:00 PM	SiCl4 post valve closed
5/31/2011	7:35:00 PM	Bubbler valve closed
5/31/2011	7:35:00 PM	Helium valve opened
5/31/2011	7:35:00 PM	Main Vac valve opened
5/31/2011	7:35:00 PM	Bypass valve opened
5/31/2011	7:35:00 PM	Helium MFC set to  100.000000
5/31/2011	7:35:00 PM	H2 MFC set to  0.000000
5/31/2011	7:35:00 PM	BCl3 MFC set to  0.000000
5/31/2011	7:35:00 PM	PHl3 MFC set to  0.000000
5/31/2011	7:35:00 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:35:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:35:00 PM	Tube furnace set to 0
5/31/2011	7:36:00 PM	Helium valve closed
5/31/2011	7:36:00 PM	H2 valve closed
5/31/2011	7:36:00 PM	BCl3 valve closed
5/31/2011	7:36:00 PM	PH3 valve closed
5/31/2011	7:36:00 PM	SiCl4 pre valve closed
5/31/2011	7:36:00 PM	SiCl4 post valve closed
5/31/2011	7:36:00 PM	Bubbler valve closed
5/31/2011	7:36:00 PM	Main Vac valve opened
5/31/2011	7:36:00 PM	Bypass valve opened
5/31/2011	7:36:00 PM	Helium MFC set to  0.000000
5/31/2011	7:36:00 PM	H2 MFC set to  0.000000
5/31/2011	7:36:00 PM	BCl3 MFC set to  0.000000
5/31/2011	7:36:00 PM	PHl3 MFC set to  0.000000
5/31/2011	7:36:00 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:36:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:36:01 PM	Tube furnace set to 0
5/31/2011	7:37:01 PM	H2 valve closed
5/31/2011	7:37:01 PM	BCl3 valve closed
5/31/2011	7:37:01 PM	PH3 valve closed
5/31/2011	7:37:01 PM	SiCl4 pre valve closed
5/31/2011	7:37:01 PM	SiCl4 post valve closed
5/31/2011	7:37:01 PM	Bubbler valve closed
5/31/2011	7:37:01 PM	Helium valve opened
5/31/2011	7:37:01 PM	Main Vac valve opened
5/31/2011	7:37:01 PM	Bypass valve opened
5/31/2011	7:37:01 PM	Helium MFC set to  100.000000
5/31/2011	7:37:01 PM	H2 MFC set to  0.000000
5/31/2011	7:37:01 PM	BCl3 MFC set to  0.000000
5/31/2011	7:37:01 PM	PHl3 MFC set to  0.000000
5/31/2011	7:37:01 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:37:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:37:01 PM	Tube furnace set to 0
5/31/2011	7:38:01 PM	Helium valve closed
5/31/2011	7:38:01 PM	H2 valve closed
5/31/2011	7:38:01 PM	BCl3 valve closed
5/31/2011	7:38:01 PM	PH3 valve closed
5/31/2011	7:38:01 PM	SiCl4 pre valve closed
5/31/2011	7:38:01 PM	SiCl4 post valve closed
5/31/2011	7:38:01 PM	Bubbler valve closed
5/31/2011	7:38:01 PM	Main Vac valve opened
5/31/2011	7:38:01 PM	Bypass valve opened
5/31/2011	7:38:01 PM	Helium MFC set to  0.000000
5/31/2011	7:38:01 PM	H2 MFC set to  0.000000
5/31/2011	7:38:01 PM	BCl3 MFC set to  0.000000
5/31/2011	7:38:01 PM	PHl3 MFC set to  0.000000
5/31/2011	7:38:01 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:38:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:38:01 PM	Tube furnace set to 0
5/31/2011	7:39:01 PM	H2 valve closed
5/31/2011	7:39:01 PM	BCl3 valve closed
5/31/2011	7:39:01 PM	PH3 valve closed
5/31/2011	7:39:01 PM	SiCl4 pre valve closed
5/31/2011	7:39:01 PM	SiCl4 post valve closed
5/31/2011	7:39:01 PM	Bubbler valve closed
5/31/2011	7:39:01 PM	Helium valve opened
5/31/2011	7:39:01 PM	Main Vac valve opened
5/31/2011	7:39:01 PM	Bypass valve opened
5/31/2011	7:39:01 PM	Helium MFC set to  100.000000
5/31/2011	7:39:01 PM	H2 MFC set to  0.000000
5/31/2011	7:39:01 PM	BCl3 MFC set to  0.000000
5/31/2011	7:39:01 PM	PHl3 MFC set to  0.000000
5/31/2011	7:39:01 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:39:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:39:01 PM	Tube furnace set to 0
5/31/2011	7:39:54 PM	Helium valve closed
5/31/2011	7:39:54 PM	H2 valve closed
5/31/2011	7:39:54 PM	BCl3 valve closed
5/31/2011	7:39:54 PM	PH3 valve closed
5/31/2011	7:39:54 PM	SiCl4 pre valve closed
5/31/2011	7:39:54 PM	SiCl4 post valve closed
5/31/2011	7:39:54 PM	Bubbler valve closed
5/31/2011	7:39:54 PM	Main Vac valve opened
5/31/2011	7:39:54 PM	Bypass valve opened
5/31/2011	7:39:54 PM	Helium MFC set to  0.000000
5/31/2011	7:39:54 PM	H2 MFC set to  0.000000
5/31/2011	7:39:54 PM	BCl3 MFC set to  0.000000
5/31/2011	7:39:54 PM	PHl3 MFC set to  0.000000
5/31/2011	7:39:54 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:39:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:39:54 PM	Tube furnace set to 0
5/31/2011	7:40:54 PM	H2 valve closed
5/31/2011	7:40:54 PM	BCl3 valve closed
5/31/2011	7:40:54 PM	PH3 valve closed
5/31/2011	7:40:54 PM	SiCl4 pre valve closed
5/31/2011	7:40:54 PM	SiCl4 post valve closed
5/31/2011	7:40:54 PM	Bubbler valve closed
5/31/2011	7:40:54 PM	Helium valve opened
5/31/2011	7:40:54 PM	Main Vac valve opened
5/31/2011	7:40:54 PM	Bypass valve opened
5/31/2011	7:40:54 PM	Helium MFC set to  100.000000
5/31/2011	7:40:54 PM	H2 MFC set to  0.000000
5/31/2011	7:40:54 PM	BCl3 MFC set to  0.000000
5/31/2011	7:40:54 PM	PHl3 MFC set to  0.000000
5/31/2011	7:40:54 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:40:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:40:54 PM	Tube furnace set to 0
5/31/2011	7:41:54 PM	Helium valve closed
5/31/2011	7:41:54 PM	H2 valve closed
5/31/2011	7:41:54 PM	BCl3 valve closed
5/31/2011	7:41:54 PM	PH3 valve closed
5/31/2011	7:41:54 PM	SiCl4 pre valve closed
5/31/2011	7:41:54 PM	SiCl4 post valve closed
5/31/2011	7:41:54 PM	Bubbler valve closed
5/31/2011	7:41:54 PM	Main Vac valve opened
5/31/2011	7:41:54 PM	Bypass valve opened
5/31/2011	7:41:54 PM	Helium MFC set to  0.000000
5/31/2011	7:41:54 PM	H2 MFC set to  0.000000
5/31/2011	7:41:54 PM	BCl3 MFC set to  0.000000
5/31/2011	7:41:54 PM	PHl3 MFC set to  0.000000
5/31/2011	7:41:54 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:41:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:41:55 PM	Tube furnace set to 0
5/31/2011	7:41:56 PM	Run finished at 7:41 PM
5/31/2011	7:41:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/31/2011	7:51:56 PM	Helium MFC set to  50.000000
5/31/2011	7:51:58 PM	Helium valve opened
5/31/2011	7:52:02 PM	Tube furnace set to 200
5/31/2011	7:53:48 PM	Helium valve closed
5/31/2011	7:53:55 PM	Helium MFC set to  0.000000
5/31/2011	7:54:27 PM	Main Vac valve closed
5/31/2011	7:54:29 PM	Bypass valve closed
5/31/2011	7:54:39 PM	Bypass valve opened
5/31/2011	7:54:40 PM	Main Vac valve opened
5/31/2011	7:54:48 PM	Recipe started at 7:54 PM
5/31/2011	7:54:48 PM	Helium valve closed
5/31/2011	7:54:48 PM	BCl3 valve closed
5/31/2011	7:54:48 PM	PH3 valve closed
5/31/2011	7:54:48 PM	SiCl4 pre valve closed
5/31/2011	7:54:48 PM	SiCl4 post valve closed
5/31/2011	7:54:48 PM	Main Vac valve closed
5/31/2011	7:54:48 PM	Bypass valve closed
5/31/2011	7:54:48 PM	Bubbler valve closed
5/31/2011	7:54:48 PM	H2 valve opened
5/31/2011	7:54:48 PM	Helium MFC set to  0.000000
5/31/2011	7:54:48 PM	H2 MFC set to  500.000000
5/31/2011	7:54:48 PM	BCl3 MFC set to  0.000000
5/31/2011	7:54:48 PM	PHl3 MFC set to  0.000000
5/31/2011	7:54:48 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:54:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:54:48 PM	Tube furnace set to 200
5/31/2011	7:56:06 PM	Helium valve closed
5/31/2011	7:56:06 PM	BCl3 valve closed
5/31/2011	7:56:06 PM	PH3 valve closed
5/31/2011	7:56:06 PM	SiCl4 pre valve closed
5/31/2011	7:56:06 PM	SiCl4 post valve closed
5/31/2011	7:56:06 PM	Main Vac valve closed
5/31/2011	7:56:06 PM	Bypass valve closed
5/31/2011	7:56:06 PM	H2 valve opened
5/31/2011	7:56:06 PM	Bubbler valve opened
5/31/2011	7:56:06 PM	Helium MFC set to  0.000000
5/31/2011	7:56:06 PM	H2 MFC set to  400.000000
5/31/2011	7:56:06 PM	BCl3 MFC set to  0.000000
5/31/2011	7:56:06 PM	PHl3 MFC set to  0.000000
5/31/2011	7:56:06 PM	SiCl4 MFC set to  0.000000
5/31/2011	7:56:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	7:56:06 PM	Tube furnace set to 1000
5/31/2011	8:19:06 PM	Helium valve closed
5/31/2011	8:19:06 PM	PH3 valve closed
5/31/2011	8:19:06 PM	Main Vac valve closed
5/31/2011	8:19:06 PM	Bypass valve closed
5/31/2011	8:19:06 PM	H2 valve opened
5/31/2011	8:19:06 PM	BCl3 valve opened
5/31/2011	8:19:06 PM	SiCl4 pre valve opened
5/31/2011	8:19:06 PM	SiCl4 post valve opened
5/31/2011	8:19:06 PM	Bubbler valve opened
5/31/2011	8:19:06 PM	Helium MFC set to  0.000000
5/31/2011	8:19:06 PM	H2 MFC set to  400.000000
5/31/2011	8:19:06 PM	BCl3 MFC set to  2.400000
5/31/2011	8:19:06 PM	PHl3 MFC set to  0.000000
5/31/2011	8:19:06 PM	SiCl4 MFC set to  42.000000
5/31/2011	8:19:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	8:19:06 PM	Tube furnace set to 1000
5/31/2011	8:39:06 PM	Helium valve closed
5/31/2011	8:39:06 PM	BCl3 valve closed
5/31/2011	8:39:06 PM	PH3 valve closed
5/31/2011	8:39:06 PM	SiCl4 pre valve closed
5/31/2011	8:39:06 PM	SiCl4 post valve closed
5/31/2011	8:39:06 PM	Main Vac valve closed
5/31/2011	8:39:06 PM	Bypass valve closed
5/31/2011	8:39:06 PM	H2 valve opened
5/31/2011	8:39:06 PM	Bubbler valve opened
5/31/2011	8:39:06 PM	Helium MFC set to  0.000000
5/31/2011	8:39:06 PM	H2 MFC set to  400.000000
5/31/2011	8:39:06 PM	BCl3 MFC set to  0.000000
5/31/2011	8:39:06 PM	PHl3 MFC set to  0.000000
5/31/2011	8:39:06 PM	SiCl4 MFC set to  0.000000
5/31/2011	8:39:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	8:39:06 PM	Tube furnace set to 0
5/31/2011	8:40:06 PM	H2 valve closed
5/31/2011	8:40:06 PM	BCl3 valve closed
5/31/2011	8:40:06 PM	PH3 valve closed
5/31/2011	8:40:06 PM	SiCl4 pre valve closed
5/31/2011	8:40:06 PM	SiCl4 post valve closed
5/31/2011	8:40:06 PM	Main Vac valve closed
5/31/2011	8:40:06 PM	Bypass valve closed
5/31/2011	8:40:06 PM	Helium valve opened
5/31/2011	8:40:06 PM	Bubbler valve opened
5/31/2011	8:40:06 PM	Helium MFC set to  400.000000
5/31/2011	8:40:06 PM	H2 MFC set to  0.000000
5/31/2011	8:40:06 PM	BCl3 MFC set to  0.000000
5/31/2011	8:40:06 PM	PHl3 MFC set to  0.000000
5/31/2011	8:40:06 PM	SiCl4 MFC set to  0.000000
5/31/2011	8:40:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	8:40:06 PM	Tube furnace set to 0
5/31/2011	9:00:06 PM	Helium valve closed
5/31/2011	9:00:06 PM	H2 valve closed
5/31/2011	9:00:06 PM	BCl3 valve closed
5/31/2011	9:00:06 PM	PH3 valve closed
5/31/2011	9:00:06 PM	SiCl4 pre valve closed
5/31/2011	9:00:06 PM	SiCl4 post valve closed
5/31/2011	9:00:06 PM	Main Vac valve closed
5/31/2011	9:00:06 PM	Bypass valve closed
5/31/2011	9:00:06 PM	Bubbler valve closed
5/31/2011	9:00:06 PM	Helium MFC set to  0.000000
5/31/2011	9:00:06 PM	H2 MFC set to  0.000000
5/31/2011	9:00:06 PM	BCl3 MFC set to  0.000000
5/31/2011	9:00:06 PM	PHl3 MFC set to  0.000000
5/31/2011	9:00:06 PM	SiCl4 MFC set to  0.000000
5/31/2011	9:00:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:00:07 PM	Tube furnace set to 0
5/31/2011	9:00:07 PM	Run finished at 9:00 PM
5/31/2011	9:39:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	9:39:14 PM	Recipe started at 9:39 PM
5/31/2011	9:39:14 PM	H2 valve closed
5/31/2011	9:39:14 PM	BCl3 valve closed
5/31/2011	9:39:14 PM	PH3 valve closed
5/31/2011	9:39:14 PM	SiCl4 pre valve closed
5/31/2011	9:39:14 PM	SiCl4 post valve closed
5/31/2011	9:39:14 PM	Main Vac valve closed
5/31/2011	9:39:14 PM	Bypass valve closed
5/31/2011	9:39:14 PM	Bubbler valve closed
5/31/2011	9:39:14 PM	Helium valve opened
5/31/2011	9:39:14 PM	Helium MFC set to  500.000000
5/31/2011	9:39:14 PM	H2 MFC set to  0.000000
5/31/2011	9:39:14 PM	BCl3 MFC set to  0.000000
5/31/2011	9:39:14 PM	PHl3 MFC set to  0.000000
5/31/2011	9:39:14 PM	SiCl4 MFC set to  0.000000
5/31/2011	9:39:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:39:15 PM	Tube furnace set to 0
5/31/2011	9:39:19 PM	Helium valve closed
5/31/2011	9:39:19 PM	H2 valve closed
5/31/2011	9:39:19 PM	BCl3 valve closed
5/31/2011	9:39:19 PM	PH3 valve closed
5/31/2011	9:39:19 PM	SiCl4 pre valve closed
5/31/2011	9:39:19 PM	SiCl4 post valve closed
5/31/2011	9:39:19 PM	Main Vac valve closed
5/31/2011	9:39:19 PM	Bypass valve closed
5/31/2011	9:39:19 PM	Bubbler valve closed
5/31/2011	9:39:19 PM	Helium MFC set to  0.000000
5/31/2011	9:39:19 PM	H2 MFC set to  0.000000
5/31/2011	9:39:19 PM	BCl3 MFC set to  0.000000
5/31/2011	9:39:19 PM	PHl3 MFC set to  0.000000
5/31/2011	9:39:19 PM	SiCl4 MFC set to  0.000000
5/31/2011	9:39:19 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:39:19 PM	Tube furnace set to 0
5/31/2011	9:39:19 PM	Run finished at 9:39 PM
5/31/2011	9:39:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2011	9:40:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2011	9:40:37 PM	Recipe started at 9:40 PM
5/31/2011	9:40:37 PM	Helium valve closed
5/31/2011	9:40:37 PM	H2 valve closed
5/31/2011	9:40:37 PM	BCl3 valve closed
5/31/2011	9:40:37 PM	PH3 valve closed
5/31/2011	9:40:37 PM	SiCl4 pre valve closed
5/31/2011	9:40:37 PM	SiCl4 post valve closed
5/31/2011	9:40:37 PM	Main Vac valve closed
5/31/2011	9:40:37 PM	Bubbler valve closed
5/31/2011	9:40:37 PM	Bypass valve opened
5/31/2011	9:40:37 PM	Helium MFC set to  0.000000
5/31/2011	9:40:37 PM	H2 MFC set to  0.000000
5/31/2011	9:40:37 PM	BCl3 MFC set to  0.000000
5/31/2011	9:40:37 PM	PHl3 MFC set to  0.000000
5/31/2011	9:40:37 PM	SiCl4 MFC set to  0.000000
5/31/2011	9:40:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:40:37 PM	Tube furnace set to 0
5/31/2011	9:41:08 PM	Helium valve closed
5/31/2011	9:41:08 PM	H2 valve closed
5/31/2011	9:41:08 PM	BCl3 valve closed
5/31/2011	9:41:08 PM	PH3 valve closed
5/31/2011	9:41:08 PM	SiCl4 pre valve closed
5/31/2011	9:41:08 PM	SiCl4 post valve closed
5/31/2011	9:41:08 PM	Bubbler valve closed
5/31/2011	9:41:08 PM	Main Vac valve opened
5/31/2011	9:41:08 PM	Bypass valve opened
5/31/2011	9:41:08 PM	Helium MFC set to  0.000000
5/31/2011	9:41:08 PM	H2 MFC set to  0.000000
5/31/2011	9:41:08 PM	BCl3 MFC set to  0.000000
5/31/2011	9:41:08 PM	PHl3 MFC set to  0.000000
5/31/2011	9:41:08 PM	SiCl4 MFC set to  0.000000
5/31/2011	9:41:08 PM	Bypass solenoid MFC set to  0.000000
5/31/2011	9:41:08 PM	Tube furnace set to 0
5/31/2011	9:41:08 PM	Run finished at 9:41 PM
5/31/2011	9:41:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
